Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering

Szyszka, Bernd; Sittinger, V.; Jiang, Xin; Hong, Rui; Werner, Wolfgang; Pflug, Andreas; Ruske, M.; Lopp, A.

doi:10.1016/s0040-6090(03)00968-4

Cited by 63 publications

(22 citation statements)

References 7 publications

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“…Its properties include high transparency in the visible range, good electrical conductivity and etching characteristics, in conjunction with the abundance, non-toxicity and relative low price of its constituents. This makes this oxide almost ideal for low cost, large scale TCO applications [1][2][3][4][5][6]. In particular for application in photovoltaic solar cells, ZnO:Al has the additional advantage of being easily texturized, thus enabling enhanced light trapping [7,8].…”

Section: Introductionmentioning

confidence: 99%

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Tuning the crystallographic, morphological, optical and electrical properties of ZnO:Al grown by spray pyrolysis

2014

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In this contribution the effect of different deposition conditions on the physical properties of ZnO:Al grown by spray pyrolysis is outlined. In particular, it will be shown that the solvent composition affects the crystallographic orientation of the deposited films, as well as their roughness and electrical properties. Using water leads to higher resistive films than methanol. The choice of precursor salts also has an effect on the electrical properties, as using organic precursors leads to lower resistivity films. In both cases post annealing helps to reduce the overall resistivity of the films. The reduction in resistivity will change depending on the initial deposition condition of the films, with lower values observed for films deposited at lower temperature. In optimum conditions a resistivity of 7×10 -3 cm can be reproducibly achieved with inexpensive air blast nozzles at atmospheric pressure.

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Section: Introductionmentioning

confidence: 99%

“…a-Si solar cells), to enhance the optical path length in the absorber and thus overall efficiency [9,10]. On an industrial basis it is produced mostly by magnetron sputtering, which is a relatively expensive vacuum technique [5,6].…”

Section: Introductionmentioning

confidence: 99%

Tuning the crystallographic, morphological, optical and electrical properties of ZnO:Al grown by spray pyrolysis

2014

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“…[1][2][3]. They possess wide bandgap in the range 3.1eV to 3.34 eV,n-type conductivity,high resistivity and high transparency [4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Studies on Photoresponse and LPG sensitivity of transparent Al doped ZnO thin films prepared by thermal evaporation technique

Sheeba¹,

Vattappalam²,

Okram

et al. 2017

Materials Research Bulletin

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“…Among the possible dopants, Al is popularly used resulting in high quality. However, study on the Al-doped ZnO thin films mainly focused on the applications of the transparent and conductive thin films [11][12][13]. Till today, there are only few studies that have been done on the photoconductive detectors based on the Al-doped ZnO thin films.…”

Section: Introductionmentioning

confidence: 99%

The ultraviolet photoconductive detector based on Al-doped ZnO thin film with fast response

Sun

Dai

Liu

et al. 2010

Sci. China Phys. Mech. Astron.

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We report fabrication and characterization of metal-semiconductor-metal photoconductive detectors based on Al-doped ZnO thin films fabricated by radio frequency magnetron sputtering. Optical and structural properties of the thin films were characterized using various techniques. At 6 V bias, a responsivity higher than 4 A/W in the wavelength shorter than 350 nm was obtained, and this responsibility dropped quickly and reached the noise floor in the visible region. Transient response measurement revealed that the detector had a fast photoresponse with a rise time of 9 ns and a fall time of 1.2 μs. ultraviolet photodetector, ZnO:Al, photoconductive detector, ZnO

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Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering

Cited by 63 publications

References 7 publications

Tuning the crystallographic, morphological, optical and electrical properties of ZnO:Al grown by spray pyrolysis

Tuning the crystallographic, morphological, optical and electrical properties of ZnO:Al grown by spray pyrolysis

Studies on Photoresponse and LPG sensitivity of transparent Al doped ZnO thin films prepared by thermal evaporation technique

The ultraviolet photoconductive detector based on Al-doped ZnO thin film with fast response

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