Transparent conducting Sb-doped SnO2 thin films grown by pulsed laser deposition

Influence of film thickness on structural, optical, and electrical properties of spray deposited antimony doped SnO2 thin films

“…Generally, thinner film has a worse crystallinity, more lattice defects, and higher resistivity. When the film thickness increases, the crystallinity is improved gradually, the lattice defect decreases, the structure becomes more uniform, and the resistivity decreases accordingly [60]. The decrease in the resistivity values with increase in film thickness was reported earlier for undoped and doped SnO 2 films [61][62].…”

Surface Modification and Characterization of Electrosprayed Sn-Doped In<SUB>2</SUB>O<SUB>3</SUB> Thin Films

“…Among various performance parameters such as crystallinity, doping content, thickness of the films, and densification, in general, good electrical performance of the TCOs is directly related to the dense surface morphology on the films. [13][14][15][16] Thus, samples C and D are considered to have poor electrical properties because of the rough surface morphology and are discussed later. In addition, from the cross-section views of the samples (not shown in here), the thicknesses of the films are observed to be in the range of ∼227 nm to ∼237 nm for sample A, ∼232 nm to 244 nm for sample B, ∼247 nm to ∼254 nm for sample C, and ∼273 nm to 295 nm for sample D. Thus, samples C and D indicate that the thickness of the films increased as the annealing temperature using microwave increased.…”

Studies on optical properties of antimony doped SnO 2 films

“…The Sb doped SnO 2 (ATO) thin films exhibit high conductivity while maintaining its transparency in the visible optical range which are significant for the fabrication and operation of solar cells. A number of methods such as magnetron sputtering [9], chemical vapor deposition [10], pulsed laser deposition [11], electron beam evaporation [12], spray pyrolysis [13] and sol-gel methods [14] have been reported for the deposition of ATO thin films.…”

“…Undoped or doped with various atoms SnO 2 thin films were grown by sol-gel spin coating, pulsed laser deposition, DC magnetron sputtering and spray pyrolysis method using different kinds of tin sources and the structural, optical and electrical properties of thin films were investigated [1,7,9,10,13]. From these articles, it is declared that the physical properties of prepared films are strongly related to the preparation conditions and deposition method of the films.…”