We report a unified subthreshold coupling factor technique for a simultaneous extraction of the surface potential (ψ S ) and the subgap density-of-states [DOS: g(E)] over the bandgap in amorphous semiconductor thin film transistors (TFTs). It is fully based on the experimental gate bias-dependent coupling factor [m(V GS )] under subthreshold bias. Through the proposed technique only with current-voltage data under subthreshold operation, a unified extraction of the DOS with a consistent mapping of the gate bias (V GS ) to the subgap energy is obtained. Applying to amorphous InGaZnO TFTs, g(E) is obtained to be a superposition of two exponential functions with N TA = 1.62 × 10 17 eV −1 cm −3 and kT TA = 0.026 eV for the tail states while N DA = 6.5 × 10 16 eV −1 cm −3 and kT DA = 0.22 eV for the deep states. Index Terms-Amorphous InGaZnO (a-IGZO), coupling factor, subgap density-of-states (DOS), subthreshold current, surface potential, thin film transistors (TFT).