2011
DOI: 10.1002/pssa.201001079
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Traps and defects in pre‐ and post‐ stressed AlGaN–GaN high electron mobility transistors

Abstract: We used deep level transient spectroscopy (DLTS) and HR-TEM techniques to study traps and defects in pre-and poststressed AlGaN/GaN high electron mobility transistors (HEMTs) grown by MOCVD on semi-insulating SiC substrates. DLTS identified two dominant traps with activation energies of 0.5 and 0.7 eV in both pre-and post-stressed GaN HEMTs. Electrical stress resulted in a significant increase in the density of 0.5 eV traps. This is attributed to point defects (most likely N antisites) in the AlGaN barrier and… Show more

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Cited by 16 publications
(8 citation statements)
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“…As a direct consequence of stressing, formation of new traps and/or increase in trap activity has often been linked with degradation . Moreover, trapping itself has even been cited as the principal/supporting mechanism behind the observed stress induced decrease in drain current depending upon the device or stress regime .…”
Section: Electrical Structural Analysis and Discussionmentioning
confidence: 99%
“…As a direct consequence of stressing, formation of new traps and/or increase in trap activity has often been linked with degradation . Moreover, trapping itself has even been cited as the principal/supporting mechanism behind the observed stress induced decrease in drain current depending upon the device or stress regime .…”
Section: Electrical Structural Analysis and Discussionmentioning
confidence: 99%
“…Deep‐level transient spectroscopy (DLTS) measurements were performed after stress, to detect a new peak ( E a = 1.08 eV) attributed to interface traps 3. Electrical stress results in a significant increase in the density of 0.5 eV traps, which is attributed to point defects in the AlGaN barrier 4, 5. Gate sinking into the barrier was observed in TEM images for an L g = 0.15 µm T‐gate device stressed in dry nitrogen 6.…”
Section: Introductionmentioning
confidence: 94%
“…Reliability had therefore become fundamental for product qualification, and GaN‐based HFETs had their documented share of three‐temperature life‐testing, high‐temperature storage, humidity testing, thermal cycling, ESD/EOS testing, mechanical testing, and so forth. However, it is more instructive to turn one's attention from the life‐testing to the study of physical degradation mechanisms 1–6.…”
Section: Introductionmentioning
confidence: 99%
“…It is demonstrated that inverse piezoelectric-induced degradation can be alleviated by reducing Al content in the AlGaN barrier, by optimizing field plate to counterbalance the strain, and even by introducing an AlGaN back barrier. [7][8][9][10] Nevertheless, reliability of GaN RF HEMTs at stressing voltage higher than 100 V remains to be investigated.…”
Section: Introductionmentioning
confidence: 99%