Reverse bias stressing in AlGaN/GaN high electron mobility transistors (HEMTs) compelled severe degradation of drain current (I DS ) whereas gate current (I G ) remained largely unaffected. Besides, the response of access region conductivity to pulse drives was found to deteriorate gradually as a result of stress, and an interacting deep level in the form of kink effect was observed. Post degradation, SEM imaging evidenced the field-induced formation of protruding particles, immediately adjacent to the gate electrode. Auger spectroscopy and elemental mapping chemically identified these insulating particles as gallium oxide. Barrier/channel consumption in the form of electrochemical oxidation is thus held responsible for I DS degradation whereas I G degradation is entirely attributed on the presence of passivation layer. SEM micrographs of the (a) tested, and (b) untested finger of a À80 V bias stressed HEMT. (c) Auger spectra from an insulating particle, whereas (d) and (e) are oxygen and gallium elemental maps of the entire frame (c).