2019
DOI: 10.1016/j.wear.2018.11.035
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Tribochemical wear of silicon nitride against silicate and phosphate glasses

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Cited by 6 publications
(1 citation statement)
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“…The core of tribochemical mechanical polishing is the tribochemical reaction [22,23], which includes the tribochemical reaction under dry friction and the tribochemical reaction under wet conditions. The polishing solution used in tribochemical mechanical polishing does not contain free abrasives [24,25], the polishing solution is deionized water or chemical solution, and the workpiece material removal method is mostly removed by tribochemical wear [26,27]. Due to the advantages of good surface flatness and fewer scratches on the workpiece obtained by this method, it has attracted extensive the attention of many scholars.…”
Section: Introductionmentioning
confidence: 99%
“…The core of tribochemical mechanical polishing is the tribochemical reaction [22,23], which includes the tribochemical reaction under dry friction and the tribochemical reaction under wet conditions. The polishing solution used in tribochemical mechanical polishing does not contain free abrasives [24,25], the polishing solution is deionized water or chemical solution, and the workpiece material removal method is mostly removed by tribochemical wear [26,27]. Due to the advantages of good surface flatness and fewer scratches on the workpiece obtained by this method, it has attracted extensive the attention of many scholars.…”
Section: Introductionmentioning
confidence: 99%