“…These films show the highest sp3 fraction for hydrogenated films of 75%, a hardness of 60 GPa, and a mass density of 2.9 g/cm3. Hydrogen and nitrogen containing films deposited by other methods such as variations of the sputter technique and plasma enhanced CVD have a lower sp3 fraction around 20-40%, a hardness of 15-35 GPa, an elastic modulus of 100-200 GPa, a mass density of 1.7-2.3 g/cm3, and a stress of 1-3 GPa [16,18,[19][20][21]25,26].…”