Tribological Properties of High Hardness ta-CNx Coatings Deposited by Filtered Arc Deposition with Block-on-Ring Tribotester

Hattori, Takafumi; Umehara, Noritsugu; Kousaka, Hiroyuki; Deng, Xinrui; Manabe, Kazuyoshi; Hayashi, Keiji

doi:10.1016/j.promfg.2016.08.096

Cited by 6 publications

(7 citation statements)

References 9 publications

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“…The decrease in hardness and density of a DLC film with an increase in the N content in the film was similar to the results of a previous study. 13) It was considered that the increase in the number of graphite structures was a result of the N content being increased. 13,16) The increase in the number of graphite structures in the films, as the N content increased, caused a decrease in the film density, and the nanoindentation hardness decreased as well.…”

Section: Resultsmentioning

confidence: 99%

“…13) It was considered that the increase in the number of graphite structures was a result of the N content being increased. 13,16) The increase in the number of graphite structures in the films, as the N content increased, caused a decrease in the film density, and the nanoindentation hardness decreased as well. In the comparison of N-DLC and carbon nitride (CN x ) films with the same N content of about 4%, the nanoindentation hardness of the N-DLC film prepared by the T-FAD method was 27 GPa and that of the CN x film prepared by the ion-beam-assisted mixing deposition (IBAD) method was 21 GPa.…”

Section: Resultsmentioning

confidence: 99%

“…There are several reports on conductivity in N-containing DLC (N-DLC) films. [13][14][15][16][17][18][19][20][21][22][23][24][25] In addition, this type of film improves friction characteristics and easily changes the optical band gap. Broitman et al fabricated an N-DLC film by unbalanced reactive magnetron sputtering.…”

Section: Introductionmentioning

confidence: 99%

“…Hattori et al evaluated the tribological performance of N-DLC films with high mechanical hardness prepared by filtered arc deposition. 13) Rodil et al produced hard and soft N-DLC films by the filtered cathodic vacuum arc method and DC magnetron sputtering method, respectively. 16) For the hard N-DLC film, the optical band gap showed a tendency to rapidly decrease at a low N content with an N=C composition ratio of 0 to 0.4.…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Fabrication of nitrogen-containing diamond-like carbon film by filtered arc deposition as conductive hard-coating film

Iijima

Harigai

Isono

et al. 2017

Jpn. J. Appl. Phys.

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Diamond-like carbon (DLC) films, which are amorphous carbon films, have been used as hard-coating films for protecting the surface of mechanical parts. Nitrogen-containing DLC (N-DLC) films are expected as conductive hard-coating materials. N-DLC films are expected in applications such as protective films for contact pins, which are used in the electrical check process of integrated circuit chips. In this study, N-DLC films are prepared using the T-shaped filtered arc deposition (T-FAD) method, and film properties are investigated. Film hardness and film density decreased when the N content increased in the films because the number of graphite structures in the DLC film increased as the N content increased. These trends are similar to the results of a previous study. The electrical resistivity of N-DLC films changed from 0.26 to 8.8 Ω cm with a change in the nanoindentation hardness from 17 to 27 GPa. The N-DLC films fabricated by the T-FAD method showed high mechanical hardness and low electrical resistivity.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Fabrication of nitrogen-containing diamond-like carbon film by filtered arc deposition as conductive hard-coating film

Iijima

Harigai

Isono

et al. 2017

Jpn. J. Appl. Phys.

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show abstract

“…Harder N-DLC films in the N-DLC films have been prepared by filtered arc deposition (FAD) methods. 3,[18][19][20][21][22][23][24][25][26] The FAD methods are vacuum arc deposition (VAD) methods equipping a filtering duct for removing fine particles called a droplet generated from a cathode. 3,18) In the VAD method, an arc spot that is active at high temperature is formed on a cathode, and the cathode material evaporates.…”

Section: Introductionmentioning

confidence: 99%

Wear-resistive and electrically conductive nitrogen-containing DLC film consisting of ultra-thin multilayers prepared by using filtered arc deposition

Harigai

Tamekuni

Iijima

et al. 2019

Jpn. J. Appl. Phys.

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Nitrogen-containing diamond-like carbon (N-DLC) multilayer films approximately 500 nm thick were fabricated on tungsten carbide substrates as surface protective films with high wear-resistive and conductive properties. Each layer thickness of the N-DLC multilayer films was approximately 10 nm, and the films were a periodic bilayer structure consisting of hard and soft N-DLC layers. Owing to the high abrasion resistance of the hard layer and the low aggressiveness and high adhesion of the soft layer, the multilayer films showed good polishing and wear resistances compared with the hard N-DLC monolayer film, and the electrical resistivity was about half. In the case of DLC multilayer films consisting of hard N-free DLC and N-DLC films, the decrease of each layer thickness leads to the reduction of the polishing resistance. From X-ray reflectivity analysis of ultra-thin N-free DLC films, it was indicated that the film density of an ultra-thin N-free DLC film is lower than that of a thick N-free DLC film. In the DLC multilayer film with thin N-free DLC layers, it is possible that the polishing resistance of the whole DLC film reduced because the hardness the N-free DLC layer was decreased due to the low film density of each N-free DLC layer.

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Effect of oil temperature and counterpart material on the wear mechanism of ta-CNx coating under base oil lubrication

Liu

Yamaguchi

Umehara

et al. 2017

Wear

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Tribological Properties of High Hardness ta-CNx Coatings Deposited by Filtered Arc Deposition with Block-on-Ring Tribotester

Cited by 6 publications

References 9 publications

Fabrication of nitrogen-containing diamond-like carbon film by filtered arc deposition as conductive hard-coating film

Fabrication of nitrogen-containing diamond-like carbon film by filtered arc deposition as conductive hard-coating film

Wear-resistive and electrically conductive nitrogen-containing DLC film consisting of ultra-thin multilayers prepared by using filtered arc deposition

Effect of oil temperature and counterpart material on the wear mechanism of ta-CNx coating under base oil lubrication

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