True Auger Electron Spectra Measured with a Novel Cylindrical Mirror Analyser (Au, Ag and Cu)

Takeichi, Yoshinori; Goto, Keisuké

doi:10.1002/(sici)1096-9918(199701)25:1<17::aid-sia206>3.0.co;2-0

Cited by 28 publications

(15 citation statements)

References 1 publication

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“…In our previous works we have investigated backscattering electron energy spectra with cascade secondary electrons included [25,26]; the relative intensity calculated agrees excellently well with the experimental N(E) curve of backscattering background of Auger electron spectroscopy spectra that measured by Goto and coworkers with their novel cylindrical mirror analyzer (CMA) [27,28]. It is further shown that both the simulated absolute secondary electron yields for several metals and the relative yield curve for about twenty metals −187− Journal of Surface Analysis Vol.…”

Section: Introductionsupporting

confidence: 75%

On the Energy Distribution of Secondary Electrons Emitted from Metals

Ding

Shimizu

et al. 2008

JSA

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The energy distribution of secondary electrons emitted from several metals has been investigated theoretically and a comparison of Monte Carlo simulation result with an experimental measurement has been made. The Monte Carlo simulation of cascade secondary electron production is based on the use of a dielectric function for the treatment of electron inelastic scattering and secondary excitation, and on the use of Mott cross section for describing electron elastic scattering. The calculation reproduces well the weak features presented in the experimental energy spectra of secondary electrons measured with a cylindrical mirror analyzer. The result indicates that, the weak feature is resulted from the directly emitted secondary electrons after generation without energy loss processes and, thus, carries the characteristic energy transferred from the loss energy of the incident electrons. However, during their transportation to the surface much of the cascade secondary electrons have suffered quite energy losses and to be presented as the large background.

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Section: Introductionsupporting

confidence: 75%

On the Energy Distribution of Secondary Electrons Emitted from Metals

Ding

Shimizu

et al. 2008

JSA

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“…To verify theoretical modeling, we shall compare the calculated energy distribution with accurate experimental spectrum. The experimental data were measured by Goto et al in the EN ( E ) mode with a cylindrical mirror analyzer (CMA) equipped with a coaxial electron gun, which is normal to surface; the detected electrons enter the CMA at the polar angle of 42.3 ∘ ± 6 ∘ . To compare with the experimental results, we only count those emitted electrons into the corresponding CMA solid angles of detection.…”

Section: Resultsmentioning

confidence: 99%

“…On the other hand, for the accurate experiment measurement of electron spectrum, Goto et al have developed a novel cylindrical mirror analyzer (CMA) system equipped with a coaxial electron gun; by eliminating many experimental error sources the standard EN ( E ) spectra have been measured for many materials in full energy range and down to very low primary energies . Such spectra data are then ideal for comparison with the simulation result in order to test the validity of the physical model.…”

Section: Introductionmentioning

confidence: 99%

Monte Carlo simulation of full energy spectrum of electrons emitted from silicon in Auger electron spectroscopy

Cao

et al. 2014

Surf. Interface Anal.

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A Monte Carlo simulation including surface excitation, Auger electron-and secondary electron production has been performed to calculate the energy spectrum of electrons emitted from silicon in Auger electron spectroscopy (AES), covering the full energy range from the elastic peak down to the true-secondary-electron peak. The work aims to provide a more comprehensive understanding of the experimental AES spectrum by integrating the up-to-date knowledge of electron scattering and electronic excitation near the solid surface region. The Monte Carlo simulation model of beam-sample interaction includes the atomic ionization and relaxation for Auger electron production with Casnati's ionization cross section, surface plasmon excitation and bulk plasmon excitation as well as other bulk electronic excitation for inelastic scattering of electrons (including primary electrons, Auger electrons and secondary electrons) through a dielectric functional approach, cascade secondary electron production in electron inelastic scattering events, and electron elastic scattering with use of Mott's cross section. The simulated energy spectrum for Si sample describes very well the experimental AES EN(E) spectrum measured with a cylindrical mirror analyzer for primary energies ranging from 500 eV to 3000 eV. Surface excitation is found to affect strongly the loss peak shape and the intensities of the elastic peak and Auger peak, and weakly the low energy backscattering background, but it has less effect to high energy backscattering background and the Auger electron peak shape.

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“…16 The relation between the redistributed SE energy and the tertiary-electron emission yield is identical to that between the primary-electron energy and the SE emission yield. 16 The relation between the redistributed SE energy and the tertiary-electron emission yield is identical to that between the primary-electron energy and the SE emission yield.…”

Section: Secondary-electron Redistribution and Image Contrastmentioning

confidence: 78%

Negative charging-up contrast formation of multilayered structures with a nonpenetrating electron beam in scanning-electron microscope

Miyoshi

Ura

2005

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Articles you may be interested inAnalysis of electrical charging and discharging kinetics of different glasses under electron irradiation in a scanning electron microscopeIn this article, we explain the contrast-formation mechanisms of the scanning-electron microscope for insulating samples under a nonpenetrating irradiation condition. Our fundamental point is that the detected secondary-electron signal current is only modified by the surface potential distribution. We propose a semiempirical model to explain the image contrast caused by excess negative-charge buildup on the surface of the insulating samples. The model treats the redistribution of secondary electrons and the contribution of tertiary electrons. The image-contrast formation mechanism of two typical examples is explained.

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True Auger Electron Spectra Measured with a Novel Cylindrical Mirror Analyser (Au, Ag and Cu)

Cited by 28 publications

References 1 publication

On the Energy Distribution of Secondary Electrons Emitted from Metals

On the Energy Distribution of Secondary Electrons Emitted from Metals

Monte Carlo simulation of full energy spectrum of electrons emitted from silicon in Auger electron spectroscopy

Negative charging-up contrast formation of multilayered structures with a nonpenetrating electron beam in scanning-electron microscope

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