Tunability and Electrical Properties of Yttria-doped-ceria Films Fabricated via Atomic Layer Deposition

Abstract

Current Solid Oxide Fuel Cell (SOFC) designs have operating temperatures between 800-1000 °C. Reducing this temperature to 500-600 °C would allow efficient utilization in varied applications. Yttria Doped Ceria (YDC) films show high ionic conductivity when used as fuel cell electrolytes in lower temperature ranges. This investigation shows that stoichiometric tunability of YDC film composition can be achieved through Atomic Layer Deposition (ALD). Film resistivity at room temperature is measured using a custom four-point probe sensor Film resistance analysis provides a method for evaluating the effect of doping and thickness of the film on desirable SOFC electrolyte characteristics such as high ionic conductivity.

Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection

“…[19][20][21] Common precursors used for Y 2 O 3 thin film deposition are cyclopentane (Cp) based molecules; bisisopropylcyclpentadienyl-diisopropylacetamidinate yttrium [Y( i PrCp) 2 (N-i Pr-amd)], [22][23][24] tris-methylcyclopentadienyl yttirium [Y(MeCp) 3 ], 18) tris-ethylcyclopentadienyl yttrium [Y( i EtCp) 3 ], 25,26) tris-isopropylcyclopentadienyl yttrium Y( i PrCp) 3 . 14,27) For oxidant, either H 2 O, ozone or O 2 remote plasma is used to remove the ligands of the precursors and to oxidize the chemisorbed surface Y atoms.…”