Tunable guided-mode resonant filter with wedged waveguide layer fabricated by masked ion beam etching

Qian, Linyong; Zhang, Dawei; Tao, Chunxian; Hong, Richang; Zhuang, Songlin

doi:10.1364/ol.41.000982

Cited by 30 publications

(8 citation statements)

References 11 publications

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“…[160] We would also like to report the fabrication of wedged RWG used as tunable filers, whose resonance spans over 40 nm in the visible range in the case of 50 nm increment of the waveguide thickness. [161] Other implementations include the patterning of RWG on suspended membranes for improved quality factor and flattened sidebands, [162][163][164] that is, for laser cavities, [165] and RWGs on concave lenses to increase the resonance wavelength and decrease the linewidth. [166] Finally, RWGs made with antireflective coating have been studied.…”

Section: Narrowband and Broadband Filtersmentioning

confidence: 99%

Recent Advances in Resonant Waveguide Gratings

Quaranta

Basset

Martin

et al. 2018

Laser & Photonics Reviews

321

199

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Resonant waveguide gratings (RWGs), also known as guided mode resonant (GMR) gratings or waveguide‐mode resonant gratings, are dielectric structures where these resonant diffractive elements benefit from lateral leaky guided modes from UV to microwave frequencies in many different configurations. A broad range of optical effects are obtained using RWGs such as waveguide coupling, filtering, focusing, field enhancement and nonlinear effects, magneto‐optical Kerr effect, or electromagnetically induced transparency. Thanks to their high degree of optical tunability (wavelength, phase, polarization, intensity) and the variety of fabrication processes and materials available, RWGs have been implemented in a broad scope of applications in research and industry: refractive index and fluorescence biosensors, solar cells and photodetectors, signal processing, polarizers and wave plates, spectrometers, active tunable filters, mirrors for lasers and optical security features. The aim of this review is to discuss the latest developments in the field including numerical modeling, manufacturing, the physics, and applications of RWGs. Scientists and engineers interested in using RWGs for their application will also find links to the standard tools and references in modeling and fabrication according to their needs.

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Section: Narrowband and Broadband Filtersmentioning

confidence: 99%

Recent Advances in Resonant Waveguide Gratings

Quaranta

Basset

Martin

et al. 2018

Laser & Photonics Reviews

321

199

View full text Add to dashboard Cite

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“…where j = (− 1) 1/2 , k 0 = 2π/λ, with λ as the wavelength in free space, [29]. The ratio of wavelength increment to thickness is much higher than our work, which is mainly because of the different waveguide material.…”

Section: Resultsmentioning

confidence: 56%

Nano-structured transmissive spectral filter matrix based on guided-mode resonances

Weber

Hinze

et al. 2019

J. Eur. Opt. Soc.-Rapid Publ.

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Background: In this work, a nanostructured guided-mode resonance filter matrix with high transmission efficiency and narrow bandwidth is demonstrated. The developed nano-filter arrays have various usages, e.g., combined with the CMOS image sensors to realize compact spectrometers for biomedical sensing applications. Methods: In order to optimize the filter performance, the spectral responses of filters with different structural parameters are carefully studied based on the variable-controlling method. A quality factor is carried out for quantitative characterization. Results: In this case, a high fill factor of 0.9 can strongly suppress sidebands, while buffer layer thickness can be adjusted to mainly control the bandwidth. The transmission peaks shift from 386 nm to 1060 nm with good linearity when periods vary from 220 nm to 720 nm. The incident angle dependence is simulated to be~1.1 nm/degree in ±30°range. The filters are then fabricated and characterized. The results obtained from both simulations and experiments agree well, where the filters with the period of 352 nm exhibit simulated and measured transmission peaks of 564 nm and 536 nm, the FWHM of 13 nm and 17 nm, respectively. In terms of metal material, besides aluminum, silver is also investigated towards optimization of the transmission efficiency. Conclusion: The transmission spectra of designed filters have high transmission and low sideband; its peaks cover the whole visible and near infrared range. These characteristics allow them to have the possibility to be integrated into image sensors for spectrometer applications.

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“…As can be seen in Fig. 2(a), high-order resonant modes are occurred as the thickness of the sublayer is increased, and the refection response of the ZCG become more complicated due to the hybridization of multiple resonances, which is significantly different from those low-contrast gratings [23], [24]. In particular, in the near-wavelength regime, where the grating period is confined between the wavelengths inside the grating material and its surrounding media with λ/n < < λ, mirror effect of the ZCG can be realized due to the overlapping of multiple resonant modes.…”

Section: Resultsmentioning

confidence: 99%

Resonant Excitation Analysis on Asymmetrical Lateral Leakage of Light in Finite Zero-Contrast Grating Mirror

Sang

Yin

et al. 2020

IEEE Photonics J.

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Resonant excitation analysis on asymmetrical lateral leakage of light in the finite zero-contrast grating (ZCG) mirror is demonstrated, and the size effect of the excited source is investigated. The dispersion equation of slab waveguide for the TM mode is proposed to evaluate the resonant condition of the ZCG mirror, and it is shown that the mirror effect of the infinite ZCG is resulted from the overlapping of order-mode resonance pairs. However, two leaky channels are excited in spectra of the finite ZCG mirror for the normal-incident Gaussian source, where bound states in the continuums (BICs) turn into quasi-BICs as the angular component is nonzero. The leaky channels are confined in the grating layer and the sublayer, and they are all transferred from the symmetrical mode to the asymmetrical mode along the lateral direction from the center of the ZCG. The asymmetrical loss of the lateral leakage of light relative to incidence direction, in principle, can break reflection reciprocity of the symmetrical system of the finite ZCG mirror. By changing the excited source from the grating side to the sublayer side, the lateral leakage of light of the finite ZCG mirror can be efficiently reduced.

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Tunable guided-mode resonant filter with wedged waveguide layer fabricated by masked ion beam etching

Cited by 30 publications

References 11 publications

Recent Advances in Resonant Waveguide Gratings

Recent Advances in Resonant Waveguide Gratings

Nano-structured transmissive spectral filter matrix based on guided-mode resonances

Resonant Excitation Analysis on Asymmetrical Lateral Leakage of Light in Finite Zero-Contrast Grating Mirror

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