Label-free
optical sensors are attractive candidates, for example,
for detecting toxic substances and monitoring biomolecular interactions.
Their performance can be pushed by the design of the sensor through
clever material choices and integration of components. In this work,
two porous materials, namely, porous silicon and plasmonic nanohole
arrays, are combined in order to obtain increased sensitivity and
dual-mode sensing capabilities. For this purpose, porous silicon monolayers
are prepared by electrochemical etching and plasmonic nanohole arrays
are obtained using a bottom-up strategy. Hybrid sensors of these two
materials are realized by transferring the plasmonic nanohole array
on top of the porous silicon. Reflectance spectra of the hybrid sensors
are characterized by a fringe pattern resulting from the Fabry–Pérot
interference at the porous silicon borders, which is overlaid with
a broad dip based on surface plasmon resonance in the plasmonic nanohole
array. In addition, the hybrid sensor shows a significant higher reflectance
in comparison to the porous silicon monolayer. The sensitivities of
the hybrid sensor to refractive index changes are separately determined
for both components. A significant increase in sensitivity from 213
± 12 to 386 ± 5 nm/RIU is determined for the transfer of
the plasmonic nanohole array sensors from solid glass substrates to
porous silicon monolayers. In contrast, the spectral position of the
interference pattern of porous silicon monolayers in different media
is not affected by the presence of the plasmonic nanohole array. However,
the changes in fringe pattern reflectance of the hybrid sensor are
increased 3.7-fold after being covered with plasmonic nanohole arrays
and could be used for high-sensitivity sensing. Finally, the capability
of the hybrid sensor for simultaneous and independent dual-mode sensing
is demonstrated.