Tungsten-Titanium as Advanced Material for RF-MEMS Switches

Klein, Susanne; Seidel, Helmut; Schmidt, Ulrich; Ziegler, Volker; Prechtel, U.; Würtz, Alida

doi:10.1007/978-3-540-77980-3_14

Cited by 2 publications

(1 citation statement)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The specific application of RF MEMS switches requires a trade-off between the mechanical and microwave properties. Instead of silicon, metal materials [6][7][8] are employed to construct the mechanical structure in order to pursue a lower insertion loss in the millimeterwave region. Gold is the most widely used metal material because of its high conductance and high corrosion resistance.…”

Section: Introductionmentioning

confidence: 99%

Improving performance of the metal-to-metal contact RF MEMS switch with a Pt–Au microspring contact design

Liu

et al. 2011

J. Micromech. Microeng.

View full text Add to dashboard Cite

Performances of the metal-to-metal contact radio frequency (RF) MEMS switches largely rely on the contacts. A novel contact employing the microspring structure is demonstrated in this paper. The microspring contact can achieve a stable contact at lower actuation voltage, alleviating mechanical wear on the contacts, and can effectively increase the fabrication tolerance. An in-line Pt–Au microspring contact switch was fabricated and characterized. To evaluate the improvement in performance, the results were compared with those of the Au–Au solid contact switch without a microspring design. The highest current handled by the Pt–Au microspring contact was 150 mA per contact, whereas only 20 mA was handled by the Au–Au solid contact. The insertion loss of the Pt–Au microspring contact switch was –0.2 dB at 20 GHz, which was comparable with that of the Au–Au solid contact switch. The isolation of the Pt–Au microspring contact switch was –22 dB at 20 GHz, and that of the Au–Au solid contact switch was –18 dB. With the Pt–Au microspring contact, the switch exceeds its power handling ability and reliability with comparable RF performances.

show abstract

Section: Introductionmentioning

confidence: 99%