2009
DOI: 10.1109/mmm.2009.933592
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Tuning in to RF MEMS

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Cited by 283 publications
(114 citation statements)
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“…Intense research in emerging switch technologies has focused on achieving levels of performance far beyond that available using CMOS (complementary metal oxide semiconductors) technology. Microelectromechanical system-based switches use a mechanical movement, usually activated by a voltage/current, to control an ohmic or capacitive contact 4,5 . Although superior to gallium arsenide and silicon-based switches in terms of energy consumption and transmission properties, microelectromechanical system switches suffer from issues such as speed, dielectric charging and contact interface degradation 4,5 .…”
mentioning
confidence: 99%
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“…Intense research in emerging switch technologies has focused on achieving levels of performance far beyond that available using CMOS (complementary metal oxide semiconductors) technology. Microelectromechanical system-based switches use a mechanical movement, usually activated by a voltage/current, to control an ohmic or capacitive contact 4,5 . Although superior to gallium arsenide and silicon-based switches in terms of energy consumption and transmission properties, microelectromechanical system switches suffer from issues such as speed, dielectric charging and contact interface degradation 4,5 .…”
mentioning
confidence: 99%
“…Microelectromechanical system-based switches use a mechanical movement, usually activated by a voltage/current, to control an ohmic or capacitive contact 4,5 . Although superior to gallium arsenide and silicon-based switches in terms of energy consumption and transmission properties, microelectromechanical system switches suffer from issues such as speed, dielectric charging and contact interface degradation 4,5 . Other devices rely on recrystallization and amorphorization of a phase-change material (for example, germanium telluride) or the metal-insulator phase transition in strongly correlated materials (such as vanadium oxide, VO 2 ) to change the resistance state [6][7][8][9] .…”
mentioning
confidence: 99%
“…They have reduced size and weight, means fewer power consumption and there are lower component counts. MEMS promises superior electrical performances and are built with low cost [1]. They can be produced at massive level.…”
Section: Introductionmentioning
confidence: 99%
“…However, the tuning speed is slower than 1 μs [6]. The semiconductor varactor diode has a fast fundamental tuning speed in the order of nanoseconds [7], [12], [13]. However, the actual tuning speed of the varactor-based RF filter is limited by the time constant of the bias network.…”
mentioning
confidence: 99%