2017
DOI: 10.1063/1.4977028
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Tunneling electroresistance effect in a Pt/Hf0.5Zr0.5O2/Pt structure

Abstract: The present work reports the fabrication of a ferroelectric tunnel junction based on a CMOS compatible 2.8 nm-thick Hf0.5Zr0.5O2 tunnel barrier. It presents a comprehensive study of the electronic properties of the Pt/Hf0.5Zr0.5O2/Pt system by X-ray photoelectron and UV-Visible spectroscopies. Furthermore, two different scanning probe techniques (Piezoresponse Force Microscopy and conductive-AFM) were used to demonstrate the ferroelectric behavior of the ultrathin Hf0.5Zr0.5O2 layer as well as the typical curr… Show more

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Cited by 118 publications
(72 citation statements)
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“…In Figure e, the peaks of Ag 3d at bottom electrode are at 368.2 and 374.2 eV. These results are consistent with theoretical results . The XPS curves for Zr, Hf, and O are plotted in Figure S1 (Supporting Information).…”
Section: Resultssupporting
confidence: 87%
“…In Figure e, the peaks of Ag 3d at bottom electrode are at 368.2 and 374.2 eV. These results are consistent with theoretical results . The XPS curves for Zr, Hf, and O are plotted in Figure S1 (Supporting Information).…”
Section: Resultssupporting
confidence: 87%
“…Recently, ER in tunnel junctions involving ferroelectric HfO 2 barriers have been reported . However, available data do not allow indisputably to conclude if the observed ER is directly governed by polarization‐related effects or it results from electric‐field induced charge motion as commonly observed in non‐ferroelectric HfO 2 barriers .…”
Section: Introductionmentioning
confidence: 99%
“…An FeFET is another promising solution to achieve high linearity of the synapse weight update because the device conductance is modulated through a gate electrode that does not interfere with a current-conducting channel 12,13 . However, the implementation of FeFETs using conventional perovskite-type oxide materials finds difficulty in securing CMOS process compatibility 14,15 .…”
Section: Introductionmentioning
confidence: 99%