Tutorial: Piezoelectric and magnetoelectric N/MEMS—Materials, devices, and applications

Abstract

Nano- and micro-electromechanical systems (N/MEMSs) are traditionally based on electrostatic or piezoelectric coupling, which couples electrical and mechanical energy through acoustic resonator structures. Most recently, N/MEMS devices based on magnetoelectrics are gaining much attention. Unlike electrostatic or piezoelectric N/MEMS that rely on an AC electric field or voltage excitation, magnetoelecric N/MEMS rely on the electromechanical resonance of a magnetostrictive/piezoelectric bilayer heterostructure exhibiting a strong strain-mediated magnetoelectric coupling under the excitation of a magnetic field and/or electric field. As a consequence, magnetoelectric N/MEMS enable unprecedented new applications, ranging from magnetoelectric sensors, ultra-compact magnetoelectric antennas, etc. This Tutorial will first outline the fundamental principles of piezoelectric materials, resonator design, specifically different acoustic modes, and piezoelectric-based N/MEMS applications, i.e., radio frequency front end filters and infrared radiation sensors. We will then provide an overview of magnetoelectric materials and N/MEMS focusing on the governing physics of the magnetoelectric effect, magnetic material properties for achieving high magnetoelectric coupling, state-of-the-art magnetoelectric N/MEMS devices, and their respective applications.

Acoustic properties of piezoelectric cubic crystals

“…[169–171], and Refs. [79, 115, 172–230] provide ample information on the piezoelectric effect in general, early investigations, and early as well as some more modern data and applications.…”

Concepts and Key Technologies of Microelectromechanical Systems Resonators

“…In addition, thermal and magnetic excitations may be not as strong as the mentioned mechanisms, but they have received much attention. Magnetically excited MEMS resonators form stable oscillations through magnetoelectric coupling and magnetostrictive effects [32]. Compared with electrostatic and piezoelectric excitation, the magnetic field can be applied from a distance, so the structural design of magnetically actuated MEMS resonators is more variable [33].…”

Integrated magnetoelectrics: a path toward novel electronics with ultra-low SWaP-C

“…Conventional MEMS/NEMS devices are based on electrostatic or piezoelectric coupling widely used as the sensor elements for the sensor systems, which are much more compact compared to antennas. Most recently, magnetoelectric NEMS/MEMS antennas, which are mechanical antennas with comparable sizes to acoustic wavelength, [8] have been demonstrated by the authors to be excellent sensors, and at the same time, and can achieve combined data and wireless power transmission with efficiencies higher than that of the resonant coil-to-coil wireless power transmission. These magnetoelectric NEMS/MEMS hold great promise as future ultra-compact sensor systems with the combined sensing, power and data transmission capabilities.…”