Twenty five years of semiconductor-grade silicon

Spenke, Eberhard; Heywang, Walter

doi:10.1002/pssa.2210640102

Cited by 21 publications

(6 citation statements)

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“…[73,76,[82][83][84][85] Therefore, the reaction for production of Si from SiHCl 3 is not expressed as H 2 reduction or thermal decomposition but as chemical vapor deposition (CVD), as it is a solid-gas reaction. [10] The deposition rate of Si in the Siemens process is approximately 1 mm h À1 , which is more than three times larger than in the case of H 2 reduction of SiCl 4 . The diameters of the Si seed rods grow from 10 mm to 200-250 mm in one week for this reaction.…”

Section: H 2 Reduction And/or Thermal Decomposition Of Sihcl 3 (Siemementioning

confidence: 91%

“…In the temperature range of the Siemens process, H 2 reduction and thermal decomposition proceed simultaneously. [10,15] In this system, higher temperatures are thermodynamically favorable for thermal decomposition. The contributions of H 2 reduction and thermal decomposition to Si production have been qualitatively investigated by Sugiura and Fuwa for temperatures of 1023-1323 K. [81] Although the reactions are representatively expressed as Equations (6) and (7), the mechanism of Si deposition is complicated and includes a route via the chemical adsorption of SiCl 2 on the surface of the substrate.…”

Section: H 2 Reduction And/or Thermal Decomposition Of Sihcl 3 (Siemementioning

confidence: 99%

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Processes for Production of Solar‐Grade Silicon Using Hydrogen Reduction and/or Thermal Decomposition

2014

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High‐purity Si used for photovoltaic applications, namely, solar‐grade Si (SOG‐Si), is commercially manufactured using the Siemens process. Although the present levels of supply satisfy the demand, there can potentially be a shortage of SOG‐Si in the long term. To overcome the low productivity of the Siemens process, various types of SOG‐Si production/purification processes have been developed as post‐Siemens processes. Some processes are under development as new commercial processes. These processes can be classified into the following three categories: (1) hydrogen reduction and/or thermal decomposition of silane‐based gases in improved Siemens‐based processes, (2) metallothermic reduction of silicon halides by Zn or Al, and (3) upgrading metallurgical‐grade Si by employing metallurgical purification methods. This paper presents a review of various types of SOG‐Si production processes, particularly those based on the hydrogen reduction and/or thermal decomposition of halides and silane‐based gases. These processes are classified on the basis of Si compounds used and the reaction types; further, the features of these processes are also analyzed. Future prospects for the development of new high‐purity Si production process are also presented.

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Section: H 2 Reduction And/or Thermal Decomposition Of Sihcl 3 (Siemementioning

confidence: 91%

Section: H 2 Reduction And/or Thermal Decomposition Of Sihcl 3 (Siemementioning

confidence: 99%

Processes for Production of Solar‐Grade Silicon Using Hydrogen Reduction and/or Thermal Decomposition

2014

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“…The details of each production process are examined based on original literature and published review articles. [4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19] Most methods used for producing high-purity silicon utilize silicon compounds as intermediate feed materials that can be purifi ed to a high degree by conventional technologies. First the low-purity MG-Si is converted into silicon compounds.…”

Section: Kouji Yasuda and Toru H Okabementioning

confidence: 99%

Solar-grade silicon production by metallothermic reduction

Yasuda

Okabe

2010

JOM

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JOM • December 2010 94 www.tms.org/jom.html Overview characterization of next-generation materials How would you… …describe the overall signifi cance of this paper?Various types of production processes of solar-grade silicon are under development to replace the conventional Siemens process. This paper reviews the production processes of solar-grade silicon based on metallothermic reduction proposed or investigated in the past.…describe this work to a materials science and engineering professional with no experience in your technical specialty?With the aim of mass-producing inexpensive high-purity silicon used for solar cells, namely solar-grade silicon, many types of processes are currently under development. The production processes of solar-grade silicon based on metallothermic reduction are reviewed in this work. …describe this work to a layperson?Silicon-based solar cells play an important role in sustainable energy. Currently, new production processes of high-purity silicon for solar cells are widely being developed. This paper reviews the processes utilizing the reduction of silicon compounds which are proposed or investigated.

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“…Czochralski (CZ) silicon with the concentration of interstitial oxygen atoms (O i ) up to about 10 18 / cm 3 is the most important semiconductor material [1]. Oxygen is the most abundant impurity unintentionally incorporated from the melt in fused silica crucibles during growth.…”

Section: Introductionmentioning

confidence: 99%