Two-Degree-of-Freedom Hysteresis Compensation for a Dynamic Mirror Actuator

Mynderse, James A.; Chiu, George T.‐C.

doi:10.1109/tmech.2015.2493038

Cited by 32 publications

(9 citation statements)

References 23 publications

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“…2 (13) with the initial parameters obtained from the increasing curve of the hysteresis [22]- [24]. The identified results are shown in Fig.…”

Section: Identification Of Functions Of Capacitancementioning

confidence: 99%

“…This approach obtains linear performance by modeling and compensating the nonlinearities. Meanwhile, the feedback technique can also be applied to the compensated system to enhance the performance [8], [11]- [13]. The Preisach [14]- [16] and Prandtl-Ishlinskii models [17]- [20] are widely used to model hysteresis in piezoelectric materials.…”

Section: Introductionmentioning

confidence: 99%

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Modeling and Identification of Temperature-Dependent Hysteresis in Piezoelectric Materials Considering Parameter Sensitivity

Liu

2020

IEEE Access

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Hysteresis is an important nonlinearity effect in piezoelectric materials and is sensitive to temperature. This paper extends the saturated capacitor model to capture temperature-dependent hysteresis by replacing the constant parameters with functions of temperature. To obtain these functions, several sets of constant parameters are identified at different temperatures, and then each term of the parameters is fitted as a function with respect to temperature. In the curve fitting process, the parameter sensitivity is employed as a weight factor. The effectiveness of the proposed modeling and parameter determination procedure is verified with experimental data. The overall normalized root mean square error is approximately 5%, including 3% error caused by the identified parameters. INDEX TERMS Temperature-dependent hysteresis, modeling and identification, piezoelectric materials, saturated capacitor hysteresis model.

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“…2 (13) with the initial parameters obtained from the increasing curve of the hysteresis [22]- [24]. The identified results are shown in Fig.…”

Section: Identification Of Functions Of Capacitancementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Modeling and Identification of Temperature-Dependent Hysteresis in Piezoelectric Materials Considering Parameter Sensitivity

Liu

2020

IEEE Access

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“…1 Piezoelectric actuators are widely used in nano-positioning due to their various advantages. 2 However, hysteresis, an inherent property in piezoceramic materials, 3 becomes a key factor that hinders positioning speed and precision. Therefore, a suitable control technique is indispensable to get satisfactory positioning.…”

Section: Introductionmentioning

confidence: 99%

Active disturbance rejection control for a piezoelectric nano-positioning system: A U-model approach

Wei

Duan

Zuo

et al. 2021

Measurement and Control

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Both speed and accuracy are key issues in nano-positioning. However, hysteresis existing in piezoelectric actuators severely reduces the positioning speed and accuracy. In order to address the hysteresis, a U-model based active disturbance rejection control is proposed. Based on the linear active disturbance rejection control, a controlled plant is dynamically transformed to be pure integrators. Then, according to the U-model control, a common inversion is obtained and the controlled plant is converted to be “1.” By integrating advantages of both linear active disturbance rejection control and U-model control, the U-model based active disturbance rejection control does promote the reference tracking speed and accuracy. Stability and steady-state error of the close-loop system have been analyzed. Phase lag between the system output and the control input has been effectively eliminated, and the phase-leading advantage of the U-model based active disturbance rejection control has been confirmed. Experimental results show that the U-model based active disturbance rejection control is capable of achieving faster and more accurate positioning. Remarkable improvements and practical realization make the U-model based active disturbance rejection control more promising in nano-positioning.

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“…Nanopositioning is a key technology in modern precision and ultrahigh-precision manufacturing, such as atomic force microscope (AFM), biological micromanipulation, and precision mirror alignment [1]- [3]. For sub-nanometer resolution, fast response, large stiffness, and large blocking force, piezoelectric actuator (PZT) has been widely utilized as a crucial component in nanopositioning stages [4].…”

Section: Introductionmentioning

confidence: 99%

On the Disturbance Rejection of a Piezoelectric Driven Nanopositioning System

Wei¹,

Xia

Xue

et al. 2020

IEEE Access

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Nanopositioning systems are very popular and playing an increasingly vital role in micro and nano-scale positioning industry due to their unique ability to achieve high-precision and high-speed operation. However, hysteresis, commonly existing in piezoelectric actuators, degrades the precision seriously. Uncertain dynamics and sensor noises also greatly affect the accuracy. To address those challenges, a variable bandwidth active disturbance rejection control (VBADRC) is proposed and realized on a nanopositioning stage. All undesired issues are estimated by a time-varying extended state observer (TESO), and cancelled out by a variable bandwidth controller. Convergence of the TESO, advantages of a TESO over a linear extended state observer (LESO), and the closed-loop stability of the VBADRC are proven theoretically. Improvements of the VBADRC versus the linear active disturbance rejection control (LADRC) are validated by simulations and experiments. Both numerical and experimental results demonstrate that the VBADRC is not only able to provide the same disturbance estimation ability as the LADRC, but also more powerful in noise attenuation and reference tracking.

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Two-Degree-of-Freedom Hysteresis Compensation for a Dynamic Mirror Actuator

Cited by 32 publications

References 23 publications

Modeling and Identification of Temperature-Dependent Hysteresis in Piezoelectric Materials Considering Parameter Sensitivity

Modeling and Identification of Temperature-Dependent Hysteresis in Piezoelectric Materials Considering Parameter Sensitivity

Active disturbance rejection control for a piezoelectric nano-positioning system: A U-model approach

On the Disturbance Rejection of a Piezoelectric Driven Nanopositioning System

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