2008
DOI: 10.1109/jmems.2008.918393
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Two-Dimensional Fiber Positioning and Clamping Device for Product-Internal Microassembly

Abstract: Abstract-In this paper, we present a microelectromechanical systems-based two-degrees-of-freedom positioning device combined with a clamping structure for positioning and constraining an optical fiber. The fiber position can be controlled in the two directions perpendicular to the fiber axis using two specifically designed wedges that can be accurately moved in-plane. These wedges are positioned using in-plane thermal actuators. Actuation of a fiber tip greater than 25 µm in-plane and 40 µm out-of-plane is ach… Show more

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Cited by 13 publications
(5 citation statements)
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“…The integration of a movable micro-mirror inside the package has also received some attention [25]- [27]. Similarly, MEMS (micro-electromechanical-systems) based fiber positioning devices have also been demonstrated [28], [29]. While this certainly relaxes alignment tolerances required during assembly, it requires additional onboard electronics to dynamically control the actuation.…”
Section: Introductionmentioning
confidence: 99%
“…The integration of a movable micro-mirror inside the package has also received some attention [25]- [27]. Similarly, MEMS (micro-electromechanical-systems) based fiber positioning devices have also been demonstrated [28], [29]. While this certainly relaxes alignment tolerances required during assembly, it requires additional onboard electronics to dynamically control the actuation.…”
Section: Introductionmentioning
confidence: 99%
“…By measuring the transmitted optical power while moving the fiber using a high precision actuator, the required alignment accuracy can be met. The current applied techniques are however time-consuming, expensive, not easily automated and often not applicable for multi-fiber interconnect due to a large footprint [3], [4]. In this paper an alignment and assembly approach is proposed which addresses these issues.…”
Section: Introductionmentioning
confidence: 99%
“…For example, active alignment and clamping of an optical fibre is achieved using microelectromechanical actuators. 2 Passive alignment with submicrometer accuracy is reported using two photonic chips on a silicon optical bench. 3 Furthermore, alignment of multi-channel configurations is studied utilizing a micromechanical connector, 4 a grating coupler array, 5 laser adjustment 6 and spot size converters (SSCs).…”
Section: Introductionmentioning
confidence: 99%