Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors

Tan, Xinran; Zhu, Fan; Wang, Chao; Yu, Yang; Shi, Jian; Qi, Xue; Feng, Yong; Tan, Jiubin

doi:10.3390/s17112672

Cited by 11 publications

(1 citation statement)

References 16 publications

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“…The high-precision positioning stage is the main equipment used in micro/nano manufacturing, which is widely used in microdevice processing, optical component alignment, atomic force microscopy, micro/nano operation, and other fields [1][2][3][4]. In the field of optical image stabilization, the micro-positioning stage driven by piezoelectric actuators (PEAs) is used to compensate for the linear and angular vibration displacement of the camera, which makes the image surface coincide with the photosensitive receiving element to improve the image quality [5][6][7]. Generally, only the multi-DOF positioning stage has the positioning ability of rotation and translation [8][9][10][11], but it has the disadvantages of high manufacturing cost, complex structure, large volume, and short rotation stroke.…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of a Novel 2-DOF Rotation–Translation Precision Positioning Stage

Huang

Lei²,

An³

et al. 2023

Mathematics

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This paper presents the design, modeling, simulation, and experimental testing of a novel 2-DOF precision micro-positioning stage. A compact parallel structure is proposed and the rotation stroke of the stage is improved by reducing the rotation radius. Compared with other positioning stages, the developed stage has the advantage of large rotation stroke, compact structure, and high resonant frequency, and it can realize various positioning functions with fewer piezoelectric actuators. The simplified flexibility equation of the composite bridge mechanism was obtained through the equivalent replacement of the composite hinge, and then the transmission ratio and input stiffness analysis model of the stage are further established. Then, the simulation and experiment verify the accuracy of the model. The significant size parameters of the stage are determined according to the sensitivity analysis and verified by FEA. To decouple the rotation and translation, we establish the scale factor. The experimental results reveal that the workspace of the stage is 22.90 mrad × 95.03 μm. The step response time is 80 ms and the rotation resolution is 5 μrad under open-loop control.

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Section: Introductionmentioning

confidence: 99%

Design and Analysis of a Novel 2-DOF Rotation–Translation Precision Positioning Stage

Huang

Lei²,

An³

et al. 2023

Mathematics

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Electromagnetic Functions of Patterned 2D Materials for Micro–Nano Devices Covering GHz, THz, and Optical Frequency

Zhang

Wang

Cao

et al. 2019

Advanced Optical Materials

114

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of 2D materials, understanding electromagnetic responses and exploiting abundant strategies to control electromagnetic wave are urgently needed for developing devices. [16][17][18] Patterned structures offer a platform to develop the potential of 2D materials deeply, and even break through some limits of traditional 2D materials. Geometric structures based on such crystals increase the freedom to manipulate electromagnetic wave, giving 2D materials infinite vitality. Recently, micro-nano devices integrated with patterned graphene, MXenes, MoS 2 , WS 2 , or black phosphorus are refreshing human being's cognition, pushing micro-nano devices into a new level. [19][20][21][22][23][24] However, there is still broad space for improvement. Designing a high-performance micro-nano device remains a great challenge. Selecting materials based on the intrinsic nature, arranging layout, tailoring patterned structures, choosing fabrication methods, as well as knowing physical mechanism of devices are all key links in designing a prominent device.Intellectualization, multifunction, automation, or high integration is an inevitable trend in various devices. Reasonable utilization of physical effects to improve performance, optimize figure of merit, and integrate multiple functionalities are becoming the theme of micro-nano devices. Herein, we start from the crystal and electronic structures of several typical 2D materials to summarize the available physical effects and electromagnetic response behaviors. We highlight the progress in preparing patterned 2D materials, and emphasize the mechanism of the micro-nano devices to broaden the horizons for designing devices. Finally, we predict future directions of fabrication techniques and point out the problems in current devices. Electronic Structures and Available Physical Effects of a 2D CrystalCrystal and electronic structures codetermine the properties of materials. Crystal structure, including constituent elements, 2D materials strongly drive the development of micro-nano devices, and patterned structures based on such crystals bring new opportunities. The advanced fabrication techniques of patterned 2D materials and the analysis of their electronic structures, and physical properties to provide access to diverse applications are discussed. Special attention is given to the hotspot electromagnetic functions and devices based on patterned 2D materials, including photodetectors, optoelectronic switches, modulators, polarization converters, gratings, as well as electromagnetic wave attenuation devices. Finally, a systematical outlook on the development of patterned 2D materials in micro-nano devices is presented, pointing out the current problems and exploring the most promising directions in the future. Patterned 2D Materials

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A survey on the mechanical design for piezo-actuated compliant micro-positioning stages

Ding,

Li,

et al. 2023

Review of Scientific Instruments

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This paper presents a comprehensive review of mechanical design and synthesis methods for piezo-actuated compliant micro-positioning stages, which play an important role in areas where high precision motion is required, including bio-robotics, precision manufacturing, automation, and aerospace. Unlike conventional rigid-link mechanisms, the motion of compliant mechanisms is realized by using flexible elements, whereby deformation requires no lubrication while achieving high movement accuracy without friction. As compliant mechanisms differ significantly from traditional rigid mechanisms, recent research has focused on investigating various technologies and approaches to address challenges in the flexure-based micro-positioning stage in the aspects of synthesis, analysis, material, fabrication, and actuation. In this paper, we reviewed the main concepts and key advances in the mechanical design of compliant piezo-actuated micro-positioning stages, with a particular focus on flexure design, kineto-static modeling, actuators, material selection, and functional mechanisms including amplification and self-guiding ones. We also identified the key issues and directions for the development trends of compliant micro-positioning stages.

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Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors

Cited by 11 publications

References 16 publications

Design and Analysis of a Novel 2-DOF Rotation–Translation Precision Positioning Stage

Design and Analysis of a Novel 2-DOF Rotation–Translation Precision Positioning Stage

Electromagnetic Functions of Patterned 2D Materials for Micro–Nano Devices Covering GHz, THz, and Optical Frequency

A survey on the mechanical design for piezo-actuated compliant micro-positioning stages

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