Two dimensional microscanners with large horizontal-vertical scanning frequency ratio for high-resolution laser projectors

Hsu, Shu-Ting; Klose, Thomas; Drabe, Christian; Schenk, Harald

doi:10.1117/12.761617

Cited by 12 publications

(6 citation statements)

References 24 publications

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“…700 gm-deep cavities were formed in the glass substrate by sandblasting, in which non-evaporable getters were attached. After the getters were annealed inside the bonding apparatus to desorb gasses from their surfaces [4], anodic bonding was performed at 400°C for 30 min with applied voltage of 600 V under a pressure of 0.4 Pa. The getters inside were activated during the bonding process to absorb residual gasses in the cavities (Fig.…”

Section: Basic Structure and Fabricationmentioning

confidence: 99%

“…However, a serious drawback of such scanners is that extremely high voltage is necessary to obtain a large mirror deflection angle at high resonant frequencies using electrostatic comb drives operated in air [4]. In order to decrease the driving voltage of the scanner, the damping of torsional vibrations due to air resistance must be reduced.…”

Section: Introductionmentioning

confidence: 99%

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Vacuum Wafer Level Packaged Two-Dimensional Optical Scanner by Anodic Bonding

Tachibana

Kawano

Ueda

et al. 2009

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems

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Vacuum wafer-level packaged two-dimensional optical scanners actuated by vertical electrostatic combs have been developed. A 1 mm-diameter gimbal mirror with high frequency deflection and a surrounding 2.5 x 3 mm movable frame with low frequency deflection are fabricated in a SOI wafer. Wafer-level packaging with anodically bonded borosilicate glass substrates on both sides together with non-evaporable getters fixed on the lower glass substrate allows hermetic sealing in high vacuum. The gimbal mirror and the movable frame are both deflected mechanically ±12 deg. at a resonant frequency of 25.1 kHz with a driving voltage of 18 V, and at a resonant frequency of 78.6 Hz with a driving voltage of 10 V, respectively. The internal pressure of the device is 20 Pa.

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Section: Basic Structure and Fabricationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Vacuum Wafer Level Packaged Two-Dimensional Optical Scanner by Anodic Bonding

Tachibana

Kawano

Ueda

et al. 2009

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems

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“…While raster scanning is the most common approach, so called Lissajous scanning with two resonant axes has also been demonstrated. The main advantages with this approach come with the driving requirements for the slow axis due to absence of harmonics [45], [51], [108]. The power consumption is also somewhat smaller.…”

Section: Non-resonant Scanners (Slow Axis)mentioning

confidence: 99%

“…FhG-IPMS has been developing electrostatically actuated MEMS scanners for over a decade [87], [127]. Much of the work has been on 2D scanners for microdisplays utilizing Lissajous scanning (see Section II and the introduction of V) [51], [94], [108]. In 2008 they presented the first 2D ES scanner capable of SVGA resolution [108].…”

Section: A Electrostatically Actuated Scannersmentioning

confidence: 99%

MEMS Laser Scanners: A Review

Holmström

Baran

Ürey

2014

J. Microelectromech. Syst.

403

175

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Laser scanners have been an integral part of MEMS research for more than three decades. During the last decade, miniaturized projection displays and various medicalimaging applications became the main driver for progress in MEMS laser scanners. Portable and truly miniaturized projectors became possible with the availability of red, green, and blue diode lasers during the past few years. Inherent traits of the laser scanning technology, such as the very large color gamut, scalability to higher resolutions within the same footprint, and capability of producing an always-in-focus image render it a very viable competitor in mobile projection. Here, we review the requirements on MEMS laser scanners for the demanding display applications, performance levels of the best scanners in the published literature, and the advantages and disadvantages of electrostatic, electromagnetic, piezoelectric, and mechanically coupled actuation principles. Resonant high-frequency scanners, low-frequency linear scanners, and 2-D scanners are included in this review. [2013-0235]

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“…The tradeoff for the device simplicity is the scan trajectory for both the horizontal and vertical axes will be sinusoidal, and the two-dimensional laser spot trajectory will follow a Lissajous figure. Such bisinusoidal scanning creates a nonuniform spatial distribution of scan lines, and a side effect is the perception by the viewer of display artifacts such as image break-up under eye saccade or motion of the projector, due to the temporal delay in generating pixels in the image that spatially may be side-by-side [3]. The effect is similar to the "rainbow effect" that occurs for color field sequential displays [4], due to temporal delay in displaying the color components of an image.…”

Section: Introductionmentioning

confidence: 99%

Bi-resonant scanning mirror with piezoresistive position sensor for WVGA laser projection systems

et al. 2012

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Fraunhofer IPMS developed a new type of small-sized scanning mirror for Laser projection systems in mobile applications. The device consists of a single crystal mirror plate of 1 mm diameter in a gimbal mounting enabling a biresonant oscillation of both axes at a resonance frequency of about 100 Hz and 27 kHz respectively. The mechanical scan angle (MSA) achieved is ± 7° for the slow and ± 12° for the fast axis. The mirror angle position and phase can be read out via two piezo-resistive sensors located at the torsion axes. In order to allow for a minimum device size of the resonantly driven slow axis the sensor of the inner fast axis was connected by a new kind of thin silicon conductors. Those are created by means of an etch stop in TMAH etch and kept as thin as possible in order to reduce their contribution to the mechanical stiffness of the mirror-supporting structures. This new system enables to lead six (or even more) independent electrical potentials onto the moving parts of the device, whereas the mechanical properties are mainly determined by only 2 torsion axes. The devices were subsequently characterized and tested. Technology details, simulation results, pictures of the device and the new conductor structures as well as measurement results are presented.

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Two dimensional microscanners with large horizontal-vertical scanning frequency ratio for high-resolution laser projectors

Cited by 12 publications

References 24 publications

Vacuum Wafer Level Packaged Two-Dimensional Optical Scanner by Anodic Bonding

Vacuum Wafer Level Packaged Two-Dimensional Optical Scanner by Anodic Bonding

MEMS Laser Scanners: A Review

Bi-resonant scanning mirror with piezoresistive position sensor for WVGA laser projection systems

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