This paper describes in detail our concept of quasi-static micro scanning mirrors enabling large static deflections and linearized scanning using vertical out-of-plane comb drives. The vertical comb configuration is realized from a planar scanner substrate by wafer bonding. The device concept is highly flexible by design; different kinds of vertical combs (e.g. staggered and angular) can be realized without changing the technological process flow but by design modifications, only. First demonstrator devices are presented: a) quasi-static 1D-scanners with 4 mm mirror diameter and ±7.5° mechanical tilt angle for beam steering and b) a quasi-static / resonant 2D-scanner enabling 2D raster scanning with SVGA resolution

The smart integration of multiple devices in a single functional unit is boosting the advent of compact optical sensors for on-site analysis. Nevertheless, the development of miniaturized and cost-effective plasmonic sensors is hampered by the strict angular constraints of the detection scheme, which are fulfilled through bulky optical components. Here, an ultracompact system for plasmonic-sensing is demonstrated by the smart integration of an organic lightemitting transistor (OLET), an organic photodiode (OPD), and a nanostructured plasmonic grating (NPG). The potential of OLETs, as planar multielectrode devices with inherent micrometer-wide emission areas, offers the pioneer incorporation of an OPD onto the source electrode to obtain a monolithic photonic module endowed with light-emitting and light-detection characteristics at unprecedented lateral proximity of them. This approach enables the exploitation of the angle-dependent sensing of the NPG in a miniaturized system based on low-cost components, in which a reflective detection is enabled by the elegant fabrication of the NPG onto the encapsulation glass of the photonic module. The most effective layout of integration is unraveled by an advanced simulation tool, which allows obtaining an optics-less plasmonic system able to perform a quantitative detection up to 10 −2 RIU at a sensor size as low as 0.1 cm 3 .

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Optical biosensors based on plasmonic sensing schemes combine high sensitivity and selectivity with label-free detection. However, the use of bulky optical components is still hampering the possibility of obtaining miniaturized systems required for analysis in real settings. Here, a fully miniaturized optical biosensor prototype based on plasmonic detection is demonstrated, which enables fast and multiplex sensing of analytes with high-and low molecular weight (80 000 and 582 Da) as quality and safety parameters for milk: a protein (lactoferrin) and an antibiotic (streptomycin). The optical sensor is based on the smart integration of: i) miniaturized organic optoelectronic devices used as light-emitting and light-sensing elements and ii) a functionalized nanostructured plasmonic grating for highly sensitive and specific localized surface plasmon resonance (SPR) detection. The sensor provides quantitative and linear response reaching a limit of detection of 10 −4 refractive index units once it is calibrated by standard solutions. Analyte-specific and rapid (15 min long) immunoassay-based detection is demonstrated for both targets. By using a custom algorithm based on principal-component analysis, a linear dose-response curve is constructed which correlates with a limit of detection (LOD) as low as 3.7 μg mL −1 for lactoferrin, thus assessing that the miniaturized optical biosensor is well-aligned with the chosen reference benchtop SPR method.

Fraunhofer IPMS developed a new type of small-sized scanning mirror for Laser projection systems in mobile applications. The device consists of a single crystal mirror plate of 1 mm diameter in a gimbal mounting enabling a biresonant oscillation of both axes at a resonance frequency of about 100 Hz and 27 kHz respectively. The mechanical scan angle (MSA) achieved is ± 7° for the slow and ± 12° for the fast axis. The mirror angle position and phase can be read out via two piezo-resistive sensors located at the torsion axes. In order to allow for a minimum device size of the resonantly driven slow axis the sensor of the inner fast axis was connected by a new kind of thin silicon conductors. Those are created by means of an etch stop in TMAH etch and kept as thin as possible in order to reduce their contribution to the mechanical stiffness of the mirror-supporting structures. This new system enables to lead six (or even more) independent electrical potentials onto the moving parts of the device, whereas the mechanical properties are mainly determined by only 2 torsion axes. The devices were subsequently characterized and tested. Technology details, simulation results, pictures of the device and the new conductor structures as well as measurement results are presented.