Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications

Abstract

This paper describes in detail our concept of quasi-static micro scanning mirrors enabling large static deflections and linearized scanning using vertical out-of-plane comb drives. The vertical comb configuration is realized from a planar scanner substrate by wafer bonding. The device concept is highly flexible by design; different kinds of vertical combs (e.g. staggered and angular) can be realized without changing the technological process flow but by design modifications, only. First demonstrator devices are presented: a) quasi-static 1D-scanners with 4 mm mirror diameter and ±7.5° mechanical tilt angle for beam steering and b) a quasi-static / resonant 2D-scanner enabling 2D raster scanning with SVGA resolution

Scanning micromirror for large, quasi-static 2D-deflections based on electrostatic driven rotation of a hemisphere

“…One the other hand, for tracking applications where the beam has to continuously track a moving point, the resonant actuation is not an option. For a 2D scanner with electrostatic actuation, a mechanical deflection of up to ± 15 • has successfully been demonstrated [3,4]. Furthermore, for electromagnetic actuation a mechanical deflection of the mirror of 32.5 • has been shown [11].…”

Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera

“…The novel device concept for vertical 3D comb drives -named LinScan -was realized by IPMS as systemin-package device and assembly [6]. Geometry of activated vertical combs are geometrically dependent on the solid body mechanism used to deflect the fixed electrode from the in plane fabrication position to the desired out of plane position.…”

A biaxial PZT optical scanner for pico-projector applications

“…Unlike the conventional scanners based on the electromagnetic [1] and electrostatic [2] types, most piezoelectric scanners do not require large current or voltage to obtain a larger scan angle at a faster speed, thereby meeting the requirements of battery-driven mobile electronics. Such a feature is also preferable for image projection displays of higher resolution.…”