Two-Dimensional Nanograting Fabrication by Multistep Nanoimprint Lithography and Ion Beam Etching

Buhl, Janek; Yoo, Dallah; Köpke, Markus; Gerken, Martina

doi:10.3390/nanomanufacturing1010004

Cited by 20 publications

(10 citation statements)

References 49 publications

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“…The fabrication of the necessary local isolation layers may be achieved using oblique deposition techniques 35,36 or lithography based on anisotropic etching. 37 We believe that the combined electrical and optical optimization of nanostructured OLEDs, taking into account the localized fields, can considerably improve the resonance-to-background ratio of the directionally outcoupled light, which is especially important for the development of compact integrated photonic lab-on-chip sensors.…”

Section: Discussionmentioning

confidence: 99%

Effect of localized current distributions in periodically nanostructured OLEDs on the resonant light outcoupling

Lueder

Buhl

Gerken

2022

Physics and Simulation of Optoelectronic Devices XXX

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We present an electrical and optical model for simulating the current distribution in and the resonant light emission from nanostructured organic light-emitting diodes (OLEDs). A periodic nanostructure in an OLED can be used as a resonant waveguide grating to tailor the light emission, i.e., to direct the dominant emission wavelength into a specific direction. We show that the current injection at nanostructured electrodes is strongly enhanced at their corners, leading to localized current paths and emission zones. These current paths have to be overlapping with the resonant optical field hot spots in order to gain maximal resonant light outcoupling. We show that this is not generally the case for periodically nanostructured OLEDs and that the introduction of local isolation layers can improve the overlap by altering the current paths. Depending on the isolation layer configuration either the resonant or non-resonant light outcoupling is pronounced. This optimization potential may be beneficial for compact organic optoelectronic sensors that require highly directional OLED emission.

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Section: Discussionmentioning

confidence: 99%

Effect of localized current distributions in periodically nanostructured OLEDs on the resonant light outcoupling

Lueder

Buhl

Gerken

2022

Physics and Simulation of Optoelectronic Devices XXX

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“…The PCS are created via nanoimprint lithography [19]. A negative mold of poly(dimethylsiloxane) (PDMS) (Dow, Sylgard 184 and curing agent at ratio of 8:1) is created from a nanostructured master.…”

Section: B Photonic Crystal Slab Fabricationmentioning

confidence: 99%

Exfoliated Flexible Photonic Crystal Slabs for Refractive Index and Biomolecular Sensing

Kraft

Schardt

Kitzler

et al. 2023

IEEE Flex. Electron.

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Using the optical transduction properties of onedimensional photonic crystal slabs is a promising approach for label-free biosensing in the field of flexible and wearable biosensing. In this work we demonstrate the fabrication of flexible photonic crystal slabs (f-PCS) via an exfoliation method from rigid photonic crystal slabs. We investigate the processing effect on the optical properties and show that the optical resonances are maintained, but affected. The quality factor changes from 50 to 31 for the TE mode and from 187 to 136 for the TM mode after the process. We demonstrate use of f-PCS for refractive index sensing and achieve a limit of detection (LOD) of 3.6 E-4 refractive index units (RIU). Furthermore, we introduce vapor-phase functionalization of the f-PCS and show first results of biosensing of antibodies from diluted feline serum.

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“…We fabricate stable photonic crystal slabs (sPCS) based on a nanoimprint lithography process [17,35]. The process is depicted in Fig.…”

Section: Fabrication Of Stable Photonic Crystal Slabs (Spcs)mentioning

confidence: 99%

Suppressing the Mechanochromism of Flexible Photonic Crystals

Kraft¹,

Harwardt²,

Schardt³

et al. 2023

Preprint

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We present flexible photonic crystal slabs (PCS) obtained by sputtering of a dielectric 100 nm Nb2O5 high refractive index layer onto a flexible nanostructured polydimethylsiloxane (PDMS) substrate with 370 nm grating period. The PCS exhibit a guided mode resonance at around 650 nm. We demonstrate that these flexible photonic crystal slabs show less than 0.5 nm resonance shift for 4% strain and call them stabilized PCS (sPCS). We compare this to a resonance shift of ~21 nm for ~4% strain of a flexible photonic crystal with a flexible nanoparticle high index layer (mechanochromatic PCS, mPCS). This high resonance shift is expected from the Bragg equations, where 4 % grating period change correspond to approximately 4 % change of the resonance wavelength (i.e., ~26 nm at a resonance wavelength of 650 nm), if changes in the mode effective refractive index are neglected. In a stretch series we obtain color-to-strain dependencies of 4.79 nm/% strain for mPCS and 0.11 nm/% strain for our stabilized sPCS. We analyze the suppression of the mechanochromism with detailed microscopy results. We observe that fissures and fractures form in the rigid waveguiding layer of the sPCS upon mechanical stress. An algorithm based on Holistically-Nested Edge Detection (HED) is used for automated counting of cracks. Rigid photonic crystal cells with sizes on the order of 10 µm to 100 µm are formed that explain the stable optical properties. Even more stable optical properties with less than 0.03 nm wavelength shift per 1% strain are demonstrated for sPCS with an additional dielectric 100 nm SiO2 low index layer beneath the Nb2O5 waveguide layer decoupling the waveguide further from the flexible PDMS substrate.

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Two-Dimensional Nanograting Fabrication by Multistep Nanoimprint Lithography and Ion Beam Etching

Cited by 20 publications

References 49 publications

Effect of localized current distributions in periodically nanostructured OLEDs on the resonant light outcoupling

Effect of localized current distributions in periodically nanostructured OLEDs on the resonant light outcoupling

Exfoliated Flexible Photonic Crystal Slabs for Refractive Index and Biomolecular Sensing

Suppressing the Mechanochromism of Flexible Photonic Crystals

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