2002
DOI: 10.1088/1464-4258/4/4/354
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Two-dimensional plastic microlens arrays by deep lithography with protons: fabrication and characterization

Abstract: In this paper we focus on the fabrication of individual plastic refractive microlenses with Deep Lithography with Protons (DLP). We give a detailed description of the microlens fabrication

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Cited by 52 publications
(25 citation statements)
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“…This will result in micro-spherical or micro-cylindrical lens surfaces. 17 Both processes can be applied to the same sample after a single irradiation session as the dose required for the etching or swelling is very different. The basic process steps of DPW are illustrated in Fig.…”
Section: Rapid Prototyping By Means Of Deep Proton Writingmentioning
confidence: 99%
“…This will result in micro-spherical or micro-cylindrical lens surfaces. 17 Both processes can be applied to the same sample after a single irradiation session as the dose required for the etching or swelling is very different. The basic process steps of DPW are illustrated in Fig.…”
Section: Rapid Prototyping By Means Of Deep Proton Writingmentioning
confidence: 99%
“…Indeed, when regions feature a low enough molecular weight they can be receptive to an in-diffusion process of an organic monomer upon which their volume will expand. This way, irradiated regions with a circular footprint will be transformed into hemi-spherically shaped micro-lenses 15 The physics behind this lithographic technique, the details of the technological processing steps, and the compatibility of this prototyping process with mass replication have been published before. 16,17 All optical interconnect components and modules presented in this work are prototyped with this generic micro-optics fabrication technology.…”
Section: Micro-optical Prototyping Technologymentioning
confidence: 99%
“…The remaining parameter that controls the shape of the micro-lenses is the dose deposited. The relationship between the focal length of the micro-lenses and the dose has been documented in extenso 15 and results in lenses showing a focal length standard deviation of 0.31 µm with a predominantly Gaussian shape.…”
Section: Technology Constraints Of Dpw Technologymentioning
confidence: 99%
“…At now, microlenses with variable focusing have been obtained by actuation of liquid crystals or other liquids through electro-wetting, electrophoresis or hydrodynamic pressure [1][2][3][4]. On the other hand, a large variety of fabrication processes have been developed for plastic/polymer based microlenses [5,6], such as embossing [7], softlithography [8], micro-molding [9], photolithography [10], electron beam lithography [11] reactive ion etching [12], laser assisted technique [6] and printing techniques [13,14]. In particular, these last techniques were advised as direct methods for high-quality and high-precision processes making the fabrication short time-consuming and cost-effective.…”
Section: Introductionmentioning
confidence: 99%