Two Dimensional Silicon Micromachined Optical Scanner Integrated With Photo Detector And Piezoresistor

Ikeda, Masaaki; Okuno, Hiroshi G.; Sakata, Minoru; Wakabayashi, S.; Imanaka, K.; Takeuchi, Masashi; Yada, Tsuneji

doi:10.1109/sensor.1995.717176

Cited by 16 publications

(5 citation statements)

References 2 publications

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“…Ikeda, et al [45] fabricated a two dimensional scanner integrated with photo detectors and piezoresistors. Actuation was done by a bulk piezoactuator with a displacement expanding mechanism.…”

Section: Scannermentioning

confidence: 99%

<title>Application of micromachining technology to optical devices and systems</title>

Fujita

1996

SPIE Proceedings

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Micromachine technologies based on IC-compatible micromachining have advantages denoted by three "M's'. Miniaturization is the most popular but Multiplicity, which means the batch fabrication capability of many complicated elements, and Microelectronics to control motions or to add different functions such as the optical function are equally important. This paper deals with the application of micromachine technologies to micro optical devices. A basic concept making the best use of the advantages is proposed. Recent examples of optical microelectromechanical systems(MEMS) are reviewed.

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Section: Scannermentioning

confidence: 99%

<title>Application of micromachining technology to optical devices and systems</title>

Fujita

1996

SPIE Proceedings

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“…MEMS scanning mirrors have been used in many applications including confocal microscopy [1,2], biomedical imaging [3,4], head-up displays [5] and Light Detection and Ranging (LiDAR) [6,7,8,9]. Nowadays, these applications, especially LiDAR for unmanned driving or unmanned aerial vehicle (UAV), have recently created a great demand for low-cost, low-dissipation and low-weighted two-axis MEMS scanning mirrors.…”

Section: Introductionmentioning

confidence: 99%

5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application

Zhang

You

2017

Sensors

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The MEMS (Micro-Electronical Mechanical System) scanning mirror is an optical MEMS device that can scan laser beams across one or two dimensions. MEMS scanning mirrors can be applied in a variety of applications, such as laser display, bio-medical imaging and Light Detection and Ranging (LiDAR). These commercial applications have recently created a great demand for low-driving-voltage and low-power MEMS mirrors. However, no reported two-axis MEMS scanning mirror is available for usage in a universal supplying voltage such as 5 V. In this paper, we present an ultra-low voltage driven two-axis MEMS scanning mirror which is 5 V compatible. In order to realize low voltage and low power, a two-axis MEMS scanning mirror with mechanical leverage driven by PZT (Lead zirconate titanate) ceramic is designed, modeled, fabricated and characterized. To further decrease the power of the MEMS scanning mirror, a new method of impedance matching for PZT ceramic driven by a two-frequency mixed signal is established. As experimental results show, this MEMS scanning mirror reaches a two-axis scanning angle of 41.9° × 40.3° at a total driving voltage of 4.2 Vpp and total power of 16 mW. The effective diameter of reflection of the mirror is 2 mm and the operating frequencies of two-axis scanning are 947.51 Hz and 1464.66 Hz, respectively.

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“…Demand for high-speed optical communications pushed the development of several novel optical systems, e.g., micromirror arrays for large optical space switches [ 4 ], continually tunable optical delay lines [ 5 ], and reconfigurable optical add/drop multiplexers (ROADMs) [ 6 ]. MEMS mirrors are promising candidates for applications where size, weight, power consumption, and cost are critical parameters [ 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 , 15 ]. They have been used in several applications to variably deflect an optical beam, e.g., wave front control [ 8 ], scanners [ 9 , 10 ] and a variety of small and large-scale optical switches [ 10 , 11 , 12 , 13 ].…”

Section: Introductionmentioning

confidence: 99%

Rotating Circular Micro-Platform with Integrated Waveguides and Latching Arm for Reconfigurable Integrated Optics

et al. 2017

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This work presents a laterally rotating micromachined platform integrated under optical waveguides to control the in-plane propagation direction of light within a die to select one of multiple outputs. The platform is designed to exhibit low constant optical losses throughout the motion range and is actuated electrostatically using an optimized circular comb drive. An angular motion of ±9.5° using 180 V is demonstrated. To minimize the optical losses between the moving and fixed parts, a gap-closing mechanism is implemented to reduce the initial air gap to submicron values. A latch structure is implemented to hold the platform in place with a resolution of 0.25° over the entire motion range. The platform was integrated with silicon nitride waveguides to create a crossbar switch and preliminary optical measurements are reported. In the bar state, the loss was measured to be 14.8 dB with the gap closed whereas in the cross state it was 12.2 dB. To the authors’ knowledge, this is the first optical switch based on a rotating microelectromechanical device with integrated silicon nitride waveguides reported to date.

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Two Dimensional Silicon Micromachined Optical Scanner Integrated With Photo Detector And Piezoresistor

Cited by 16 publications

References 2 publications

<title>Application of micromachining technology to optical devices and systems</title>

<title>Application of micromachining technology to optical devices and systems</title>

5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application

Rotating Circular Micro-Platform with Integrated Waveguides and Latching Arm for Reconfigurable Integrated Optics

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