1990
DOI: 10.1364/ao.29.001595
|View full text |Cite
|
Sign up to set email alerts
|

Two-dimensional spatial light modulators fabricated in Si/PLZT

Abstract: We report in this paper the use of Si/PLZT technology in the fabrication of 2-D electrically and optically addressed spatial light modulators. First, a 12 x 12 electrically matrix addressed array was fabricated using simultaneous laser assisted diffusion and crystallization. Then, NMOS transistors exhibiting electron mobility of 550 cm(2)/V-s were fabricated in each unit cell of the matrix array and used to control the PLZT modulator. A dynamic range of 35:1 was achieved. A 16 x 16 optically addressed SLM arra… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
6
0

Year Published

1991
1991
2011
2011

Publication Types

Select...
4
3
1

Relationship

0
8

Authors

Journals

citations
Cited by 28 publications
(6 citation statements)
references
References 7 publications
0
6
0
Order By: Relevance
“…There has been more than 50 types of OASLM produced in the eighties and nineties [159]. Many different SLMs have been proposed and many prototypes fabricated, like liquid crystal SLMs [160][161], magneto-optic SLMs [162], multiple quantum wells devices [163] , Si PLZT SLMs [164] and deformable mirror devices [165]. However, very few of these SLMs have survived.…”
Section: Research Done In the Field Of Optical Computing Based On Optmentioning
confidence: 99%
“…There has been more than 50 types of OASLM produced in the eighties and nineties [159]. Many different SLMs have been proposed and many prototypes fabricated, like liquid crystal SLMs [160][161], magneto-optic SLMs [162], multiple quantum wells devices [163] , Si PLZT SLMs [164] and deformable mirror devices [165]. However, very few of these SLMs have survived.…”
Section: Research Done In the Field Of Optical Computing Based On Optmentioning
confidence: 99%
“…Some have phase transitions at room temperatures (5 • C for BaTiO 3 [26]) but others like LiNbO 3 have much higher phase transition temperatures (>1000 • C [26]). PLZT suffers heat damage only above 900 • C [36]. Both the crystal and ceramic devices are fragile with ceramic devices also being susceptible to voltage damage (50 V [36]) and humidity [35].…”
Section: Electro-optic Devicesmentioning
confidence: 99%
“…PLZT suffers heat damage only above 900 • C [36]. Both the crystal and ceramic devices are fragile with ceramic devices also being susceptible to voltage damage (50 V [36]) and humidity [35]. The lifetime of crystal devices is usually extremely long, [25] but for ceramic devices the lifetime can be as short as 50 cycles if the material is not optimized (contamination problems) [35].…”
Section: Electro-optic Devicesmentioning
confidence: 99%
See 1 more Smart Citation
“…These materials include BaTiO 3 , (Pb,La)(Zr,Ti)0 3 (PLZT) and Pb(Mg,Nb)0 3 -PbTiO 3 (PMN-PT) solid solutions.12-1 4 All these thin film materials can be formed by means of the metal-organic chemical liquid deposition (MOCLD) technique or other methods. These thin film materials are usually polycrystalline although quasi-single-crystal films can be formed on lattice-matched substrates.…”
Section: Fundamentals Of Tfi Phase Modulatormentioning
confidence: 99%