Two-photon grayscale lithography for free-form micro-optical arrays

Aderneuer, Tamara; Fernández, Óscar Fernández; Ferrini, R.

doi:10.1364/oe.440251

Cited by 42 publications

(28 citation statements)

References 39 publications

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“…Lateral-from 100 [27] to 500 nm [54] , and axial-from 100 nm [55] to 1.5 µm [54] , or even higher ones using low NA objectives Accuracy Sub-micron ≈100 nm [56] Roughness From 3 nm [57] to order of 100 nm [13] Structure dimensions Micro-lens diameter-from few µm [58] to 2 mm [57] Waveguides-core size down to 1 µm and lengths up to 150 µm [59] Throughput (time/lens) From few minutes [60] up to 23 h [57] per lens Parallelization 4 × 4 micro-structure array [47] for visible light. This method has been demonstrated to be suitable for the fabrication of gradient refractive index (GRIN) microlenses [61] and waveguides [62] as presented in Figure 3d.…”

Section: Voxel Sizementioning

confidence: 99%

“…This method has been demonstrated to be suitable for the fabrication of gradient refractive index (GRIN) micro‐lenses [ 61 ] and waveguides [ 62 ] as presented in Figure 3d. [ 60 ]…”

Section: Fabrication Modalitiesmentioning

confidence: 99%

“…The implementation of this modality is beneficial for micro‐optical applications where high surface quality is required for better optical performance, reducing the manufacturing time. [ 60 ]…”

Section: Fabrication Modalitiesmentioning

confidence: 99%

“…This method has been demonstrated to be suitable for the fabrication of gradient refractive index (GRIN) microlenses [61] and waveguides [62] as presented in Figure 3d. [60] The same control over the laser intensity can result in a different modality that significantly reduces the fabrication time and improves the surface quality. A change in the fabrication laser intensity leads to a change in the focal volume, changing the voxel size, hence enabling higher accuracy for edges and borders of the 3D structures.…”

Section: Voxel Sizementioning

confidence: 99%

mentioning

confidence: 99%

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Micro‐Optics 3D Printed via Multi‐Photon Laser Lithography

Gonzalez‐Hernandez

Varapnickas

Bertoncini

et al. 2022

Advanced Optical Materials

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3D printed objects was first presented by Maruo in a technology-opening article in 1997, [2] where the use of this technology to fabricate micro-optics was also envisaged. The serial writing method of this technique offered flexibility for freeform fabrication, but was limited by its throughput. [3] It took some years for the technology to mature from proof-of-principle level to additive manufacturing as a tool for efficient and reliable fabrication in the modern lab. [4][5][6] Though the first micro-optical elements were demonstrated as early as 2006, [7] the major efforts and results only started to emerge in 2010, [8,9] together with the development of hybrid organic-inorganic materials, [10,11] and rapidly accelerated with the implementation of commercial 3D lithography systems. [12][13][14] By 2020, ultrafast laser 3D printing, also known as two-photon polymerization (TPP or 2PP), multiphoton lithography (MPL), [15][16][17] or simply laser direct writing (LDW), also in literature referenced as direct laser writing (DLW), [18] ) was already an established technique for routine fabrication of diverse micro-optical single elements, stacked components, and integrated devices. [19][20][21] The latest advances in the 3D printing of free-form micro-optics are enhanced by optical grade materials of high refractive index (n) polymers, [22] high-performance hybrids, [23] and optically active [24] or pure inorganic glasses. [25] Figure 1 shows the development of the technique in terms of published papers and citations, defining an "innovator stage" of the technology followed from 2015 by the "early adopters stage." Examples of micro-optical elements fabricated using MPL and the growth in the complexity of the structures that can be achieved by this technique are also shown in Figure 1.The advances in this scientific field attracted the attention of the related laser-assisted precision additive manufacturing industry. First, in 2007 Nanoscribe GmbH and in 2008 Workshop of Photonics established companies oriented toward commercialization of this technology aimed at general wide angle application fields. While in 2013, Multiphoton Optics GmbH and Femtika UAB were established and made micro-optics a significant part of their targeted applications. Finally, in 2017, Vanguard Photonics GmbH manufactured dedicated MPL equipment for micro-lenses and wire bond production. Other companies targeting more diverse applications have continued to emerge, such as UpNano established in 2018, and focusing mostly on biomedical applications yet also offering solutionsThe field of 3D micro-optics is rapidly expanding, and essential advances in femtosecond laser direct-write 3D multi-photon lithography (MPL, also known as two-photon or multi-photon polymerization) are being made. Micro-optics realized via MPL emerged a decade ago and the field has exploded during the last five years. Impressive findings have revealed its potential for beam shaping, advanced imaging, optical sensing, integrated photonic circuits, and much more. This is suppo...

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Section: Voxel Sizementioning

confidence: 99%

“…This method has been demonstrated to be suitable for the fabrication of gradient refractive index (GRIN) micro‐lenses [ 61 ] and waveguides [ 62 ] as presented in Figure 3d. [ 60 ]…”

Section: Fabrication Modalitiesmentioning

confidence: 99%

Section: Fabrication Modalitiesmentioning

confidence: 99%

Section: Voxel Sizementioning

confidence: 99%

mentioning

confidence: 99%

See 3 more Smart Citations

Micro‐Optics 3D Printed via Multi‐Photon Laser Lithography

Gonzalez‐Hernandez

Varapnickas

Bertoncini

et al. 2022

Advanced Optical Materials

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Multiphoton Lithography as a Promising Tool for Biomedical Applications

Gréant

Durme

Hoorick

et al. 2023

Adv Funct Materials

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Multiphoton lithography (MPL) is a powerful and useful structuring tool capable of generating 2D and 3D arbitrary micro‐ and nanometer features of various materials with high spatial resolution down to nm‐scale. This technology has received tremendous interest in tissue engineering and medical device manufacturing, due to its ability to print sophisticated structures, which is difficult to achieve through traditional printing methods. Thorough consideration of two‐photon photoinitiators (PIs) and photoreactive biomaterials is key to the fabrication of such complex 3D micro‐ and nanostructures. In the current review, different types of two‐photon PIs are discussed for their use in biomedical applications. Next, an overview of biomaterials (both natural and synthetic polymers) along with their crosslinking mechanisms is provided. Finally, biomedical applications exploiting MPL are presented, including photocleaving and photopatterning strategies, biomedical devices, tissue engineering, organoids, organ‐on‐chip, and photodynamic therapy. This review offers a helicopter view on the use of MPL technology in the biomedical field and defines the necessary considerations toward selection or design of PIs and photoreactive biomaterials to serve a multitude of biomedical applications.

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Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

Wang

Zhang

Ladika

et al. 2023

Adv Funct Materials

115

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The rapid development of additive manufacturing has fueled a revolution in various research fields and industrial applications. Among the myriad of advanced three-dimensional printing techniques, two-photon polymerization lithography (TPL) uniquely offers a significant electron microscope (SEM) images of SMP structures before and after programming and after recovery, respectively. Reproduced under terms of the CC-BY license. [114] Copyright 2021, The Authors, published by Nature Publishing Group. b) Stiff SMPs for high-resolution reversible nanophotonics. I-II) The deformed and recovered nanopillars under optical microscope and SEM, respectively. Reproduced with permission. [115] Copyright 2022, American Chemical Society. c) Vapor-responsive photonic arrays. I-IV) Optical image of a grid array in air, in water vapors ~ 20 s, saturation with water vapors ~ 88s, and after the gas flow stopped, respectively.Reproduced under terms of the CC-BY license. [116] Copyright 2021, The Authors, published by Royal Society of Chemistry. d) SEM image of a 40-layer face-cantered-cubic photonic structure printed by SU-8. Reproduced with permission. [117] Copyright 2004, Nature Publishing Group. e) SEM image of helices with an axial pitch of 800 nm and a radius of 800 nm fabricated by the two-step absorption photoresist. Reproduced with permission. [118]

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Two-photon grayscale lithography for free-form micro-optical arrays

Cited by 42 publications

References 39 publications

Micro‐Optics 3D Printed via Multi‐Photon Laser Lithography

Micro‐Optics 3D Printed via Multi‐Photon Laser Lithography

Multiphoton Lithography as a Promising Tool for Biomedical Applications

Two‐Photon Polymerization Lithography for Optics and Photonics: Fundamentals, Materials, Technologies, and Applications

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