Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components

Dellmann, L.; Roth, Sophie; Beuret, C.; Paratte, L.; Racine, G.-A.; Lorenz, Hubert; Despont, M.; Renaud, Philippe; Vettiger, P.; Rooij, N. F. de

doi:10.1007/s005420050119

Cited by 26 publications

(10 citation statements)

References 7 publications

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“…It can be patterned to desired shapes using UV lithography, and its thickness can be controlled for producing SU-8 submarines with proper thicknesses. SU-8 has been widely applied in the MEMS area for various high-aspect-ratio patterning purposes [27][28][29]. It can also function as a good structural material in microsystems, such as in bio microfluidic device [30,31], boats [5][6][7][8] and flotillas [9,10].…”

Section: Design and Fabrication Of Microsubmarinesmentioning

confidence: 99%

Propulsion of a microsubmarine using a thermally oscillatory approach

Qiao¹,

Luo²

2013

J. Micromech. Microeng.

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In this paper, motivated by the driving mechanism of a putt-putt toy boat, we explore the feasibility to propel a microsubmarine using a thermally oscillatory approach, which only requires a simple design and does not involve any complicated propulsive systems. We investigate the design, fabrication, actuation and horizontal motions of the corresponding microsubmarines. Based on the understanding gained through preliminary tests on two manually fabricated putt-putt boats, we designed and fabricated the prototype of a microsubmarine. Similar to a putt-putt boat, the prototype also uses a thermally oscillatory process for propulsion. In a cyclic period of this process, due to the expansion and shrinkage of a vapor bubble inside the reservoir of the submarine, liquid is first ejected outside and then sucked into the reservoir. Due to the difference in liquid flow directions between ejection and suction stages, a thrust is produced to propel the submarine. At an applied voltage of 16 V and pulse frequency of 100 Hz, the submarine was found to have the highest speed of 1.8 mm s −1 and longest travel distance of 12.6 mm. The corresponding thrust was estimated to be 67.6 nN.

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Section: Design and Fabrication Of Microsubmarinesmentioning

confidence: 99%

Propulsion of a microsubmarine using a thermally oscillatory approach

Qiao¹,

Luo²

2013

J. Micromech. Microeng.

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“…SU-8 has high optical transparency for exposure light above 360nm, which makes it ideally suited for imaging near-vertical sidewalls in thick films. SU-8 has been widely applied in the MEMS area for various high aspect ratio patterning purposes [6][7][8][9] . There exist different formulations of SU-8 negative photoresist, each containing different amounts of organic solvent (GBL or cyclopentanone), thereby producing variations in the viscosity of SU-8.…”

Section: Choice Of Materials In the Water-supply Devicesmentioning

confidence: 99%

An innovative all-polymeric drug-supply device

et al. 2005

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In this paper, we report an innovative all-polymeric drug-supply device. The micro outlet of the device was ablated through a polymethyl methacrylate (PMMA) layer using a microheater. The size of the ablated micropore was mainly related to the heater temperature profile, and the molten PMMA took the gold heater lines away from the pore area, avoiding possible block of the gold lines to the flow out of the pore. Simulation was conducted to find the temperature profile on the surface of the microheater, and experimental results have a good match with simulation results.

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“…The cured layer of SU-8 forms a highly cross-linked matrix of covalent bonds, which results in a hard glass-like coating (Dellmann et al, 1998;Lee et al, 2003). This material constitutes a costeffective solution for the production of fine-patterned, mechanical resistant structures for a variety of MEMS applications because of its compatibility with different types of standard X-ray and UV lithography techniques and with different coating processes (Cremers et al, 2001).…”

Section: Introductionmentioning

confidence: 97%

A novel enzyme entrapment in SU-8 microfabricated films for glucose micro-biosensors

Psoma

Wal

Frey

et al. 2010

Biosensors and Bioelectronics

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The present work investigates the utilisation of the widely used SU-8 photoresist as an immobilisation matrix for glucose oxidase (GOx) for the development of glucose micro-biosensors. The strong advantage of the proposed approach is the simultaneous enzyme entrapment during the microfabrication process within a single step, which is of high importance for the simplification of the BioMEMS procedures. Successful encapsulation of the enzyme GOx in "customised" SU-8 microfabricated structures was achieved through optimisation of the one-step microfabrication process. Although the process involved contact with organic solvents, UV-light exposure, heating for pre- and post-bake and enzyme entrapment in a hard and rigid epoxy resin matrix, the enzyme retained its activity after encapsulation in SU-8. Measurements of the immobilised enzyme's activity inside the SU-8 matrix were carried out using amperometric detection of hydrogen peroxide in a 3-electrode setup. Films without enzyme showed negligible variation in current upon the addition of glucose, as opposed to films with encapsulated enzyme which showed a very clear increase in current. Experiments using films of increased thickness or enzyme concentration, showed a higher response, thus proving that the enzyme remained active not only on the film's surface, but also inside the matrix as well. The proposed enzyme immobilisation in SU-8 films opens up new possibilities for combining BioMEMS with biosensors and organic electronics.

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Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components

Cited by 26 publications

References 7 publications

Propulsion of a microsubmarine using a thermally oscillatory approach

Propulsion of a microsubmarine using a thermally oscillatory approach

An innovative all-polymeric drug-supply device

A novel enzyme entrapment in SU-8 microfabricated films for glucose micro-biosensors

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