Articles you may be interested inElectron-stimulated desorption from polished and vacuum fired 316LN stainless steel coated with Ti-Zr-Hf-V Electron stimulated desorption from bare and nonevaporable getter coated stainless steels Influence of electron irradiation and heating on secondary electron yields from non-evaporable getter films observed with in situ x-ray photoelectron spectroscopy Influence of the elemental composition and crystal structure on the vacuum properties of Ti-Zr-V nonevaporable getter filmsThe vacuum behavior of stainless steel vacuum chambers, ex situ sputter coated with a thin film (ϳ1 m) of getter material, has been studied to determine if after air exposure the getter film could be activated by a bakeout so as to transform the coated vacuum chamber into a pump. The materials studied so far are Ti, Zr, Hf, and some of their binary alloys. They all display an activation temperature lower than 400°C, i.e., within the reach of the baking temperature of stainless steel vacuum chambers. The lowest activation temperature of 200-250°C, measured for an equiatomic alloy of Ti and Zr, allows extension of this method to chambers made of copper and aluminum alloys. The experimental results, described here in detail, indicate that the values of the activation temperature obtained using electron stimulated desorption, pumping speed, and Auger spectroscopy measurements are self-consistent.