2014
DOI: 10.1016/j.microrel.2014.05.005
|View full text |Cite
|
Sign up to set email alerts
|

Ultra-fine pitch palladium-coated copper wire bonding: Effect of bonding parameters

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

0
7
0

Year Published

2015
2015
2024
2024

Publication Types

Select...
7
1

Relationship

1
7

Authors

Journals

citations
Cited by 18 publications
(11 citation statements)
references
References 7 publications
0
7
0
Order By: Relevance
“…According to the Cu-Pd phase diagram [44], FCC continuous solid solution (Cu, Pd) exists above 598 • C. Because the melting point of Cu is 1083 • C, when the ball is burned, the copper bonding wire melts, and Pd is likely to dissolve in the Cu matrix to form a solid solution. Lim et al [40] found that the heat energy generated by EFO sparks is mostly used to provide the melting of Cu wire, Pd will not completely melt, Pd and Cu will form a solid solution, but will not form a uniform solid solution. Yeung et al [45] found that in the actual melting process of PdCu wire, the heating duration is too short, and Pd cannot be completely dissolved into the Cu matrix before FAB cooling.…”
Section: The Distribution Of Pd In Fab and Bonding Interfacementioning
confidence: 99%
See 2 more Smart Citations
“…According to the Cu-Pd phase diagram [44], FCC continuous solid solution (Cu, Pd) exists above 598 • C. Because the melting point of Cu is 1083 • C, when the ball is burned, the copper bonding wire melts, and Pd is likely to dissolve in the Cu matrix to form a solid solution. Lim et al [40] found that the heat energy generated by EFO sparks is mostly used to provide the melting of Cu wire, Pd will not completely melt, Pd and Cu will form a solid solution, but will not form a uniform solid solution. Yeung et al [45] found that in the actual melting process of PdCu wire, the heating duration is too short, and Pd cannot be completely dissolved into the Cu matrix before FAB cooling.…”
Section: The Distribution Of Pd In Fab and Bonding Interfacementioning
confidence: 99%
“…The study found that different EFO discharge current settings lead to full or partial coverage of Pd on FAB and will also directly affect the distribution of Pd at the bonding interface. Lim et al [ 39 , 40 ] used 0.6 mil PdCu wires to conduct experiments under low, medium, and high EFO discharge current settings. Then, a FEI dual beam focused ion beam (FIB) system was used to analyze the cross-section of FAB samples.…”
Section: The Distribution Of Pd In Fab and Bonding Interfacementioning
confidence: 99%
See 1 more Smart Citation
“…Next is the setup of the important parameters of the wire bonder, which are substrate temperature, bonding force, ultrasonic power, and bonding time. These parameters may vary depending on the materials being bonded and the desired bond strength [4]. After that is the wire bonding process, where the wire bonding machine uses a combination of heat, pressure, and ultrasonic energy to create a bond between the thin film and the component.…”
Section: Introductionmentioning
confidence: 99%
“…It was reported that the IMC phases identified in the Cu/Al bond interface are typically CuAl 2 , CuAl and Cu 9 Al 4 ; the latter two IMCs are mostly found after thermal treatment [10]. In a recent study on ultra-fine (15 μm) Pd-Cu wire bonds on Al bond pads [12], Pd was detected on the free air ball surface after electronic flame off (EFO) firing, which will affect the composition at the bond interface and the Cu-Al IMCs phase formation. So far, no systematic study has been carried out to investigate the corrosion resistance of individual Cu-Al IMCs, as well as the effect of Pd on the corrosion resistance of these metals and IMCs in a chloride medium.…”
Section: Introductionmentioning
confidence: 99%