Ultra-Precise Assembly of Micro-Electromechanical Systems (MEMS) Components

Feddema, John T.; Simon, Ronald W.; Polosky, Marc A.; Christenson, Todd R.

doi:10.2172/5833

Cited by 6 publications

(3 citation statements)

References 26 publications

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“…dominate gravitational forces at this scale 27 . During pin insertion, the parts to be pinned are moved upward by the Physik into contact with the pin guide.…”

Section: Pin Fabrication Handling and Insertionmentioning

confidence: 99%

Micro-scale force-fit insertion

Kozlowski¹,

Jones²,

Trinkle³

2002

Journal of Micromechatronics

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-Several LIGA (Lithography Galvonoforming Abforming) test mechanisms have been designed and fabricated to study tribology and performance attributes of LIGA mechanisms. The LIGA test mechanism studied in this paper is a ratchet drive mechanism consisting primarily of pawls, cams, and springs ranging in size from about one-half millimeter to tens of millimeters of various nickel alloys fabricated using the LIGA process. To assemble the test mechanism, subassemblies are made by inserting force-fit pins into stacks of piece-parts. These pins are cut from 170µm wire and range from 500 to 1000µm in length. Human insertion of these pins is extremely difficult due to their small size and tolerances required to perform the force-fit operation. This paper describes the tooling to permit fabrication, bulk handling, and force-fit insertion of pins with the operator-guided automation required to achieve micron-scale tolerances using hybrid force/position control algorithms.

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“…dominate gravitational forces at this scale 27 . During pin insertion, the parts to be pinned are moved upward by the Physik into contact with the pin guide.…”

Section: Pin Fabrication Handling and Insertionmentioning

confidence: 99%

Micro-scale force-fit insertion

Kozlowski¹,

Jones²,

Trinkle³

2002

Journal of Micromechatronics

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“…LIGA parts can be assembled by hand for research purposes, and there is ongoing work in robotic manipulation. 19 Another approach is to limit the need for assembly by employing sacrificial layers in LIGA processing. An example of a microturbine using a sacrificial technique is shown in Figure 4.…”

Section: Liga Processing Technologiesmentioning

confidence: 99%

LIGA Technologies and Applications

Hruby¹

2001

MRS Bull.

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LIGA, an acronym for the German words for lithography, electroplating, and molding, is a technique used to produce micro-electromechanical systems (MEMS) made from metals, ceramics, or plastics. The LIGA process utilizes x-ray synchrotron radiation as a lithographic light source. Highly collimated, high-energy x-rays from the synchrotron impinge on a patterned mask in proximity to an x-ray-sensitive photoresist, typically poly(methyl methacrylate) (PMMA).

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“…In the process, multiple micromirrors were self-lifted off the substrate upward by 90 • through the introduction of rotational motion on the platform. Feddema et al [14] proposed a method to assemble multiple gear trains through precise wafer alignment. Micro-components were first arranged on separate layers or pallets.…”

Section: Introductionmentioning

confidence: 99%

Parallel microassembly with a robotic manipulation system

Chu

Mills

Cleghorn

2010

J. Micromech. Microeng.

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This paper proposes a methodology to assemble multiple micro-components simultaneously with a robotic manipulator using a parallel assembly method. Through manipulating and assembling the micro-components, intricate, out-of-plane, three-dimensional micro-devices can now be fabricated. Use of a parallel microassembly process rather that a serial approach can significantly increase the productivity and reduce the cost of assembling micro-devices. The parallel microassembly operation proposed in this work was developed and implemented on a 6-DOF robot manipulator to attain considerable manufacturing flexibility. In this study, three passive microgrippers were bonded in parallel to the end-effector of the manipulator. Three microparts were then grasped by the grippers from the worktable of the manipulator, rotated 90 • , and assembled onto the base substrate simultaneously. During the parallel microassembly operation, the visual image may not be able to monitor all three gripper-part pairs simultaneously due to the limited field of view of the microscope. Through the use of an alignment-calibration algorithm with only one gripper-part set, the remaining two sets were successfully manipulated and inserted onto the desired assembly location.

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Ultra-Precise Assembly of Micro-Electromechanical Systems (MEMS) Components

Cited by 6 publications

References 26 publications

Micro-scale force-fit insertion

Micro-scale force-fit insertion

LIGA Technologies and Applications

Parallel microassembly with a robotic manipulation system

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