This paper discusses the design, fabrication and testing of a surface micromachined Counter-Meshing Gears (CMG) discrimination device which functions as a mechanically coded lock. A 24 bit code is input to unlock the device. Once unlocked, the device provides a path for an energy or information signal to pass through the device. The device is designed to immediately l&k up if any portion of the 24 bit code is incorrect. The motivation for the development of this device is based on occurrences referred to as High Consequence Events. A High Consequence Event is an event where an inadvertent operation of a system could result in the catastrophic loss of life, property, or damage to the environment.

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Understanding the parameters that affect the performance of milliscale and microscale actuators is essential to the development of optimized designs and fabrication processes, as well as the qualification of devices for commercial applications. This paper discusses the development of optical techniques for motion measurements of LIGA fabricated milliengines. LIGA processing permits the fabrication of precision millimeter-sized machine elements that cannot be fabricated by conventional miniature machining techniques because of their small feature sizes. In addition, tolerances of 1 part in lo3 to lo4 may be maintained in millimeter sized components with this processing technique. Optical techniques offer a convenient means for measuring long term statistical performance data and transient responses needed to optimize designs and manufacturing techniques. Optical techniques can also be used to provide feedback signals needed for control and sensing of the state of the machine. Optical probe concepts and experimental data obtained using a milliengine developed at Sandia National Laboratories are presented.

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