Ultra-Precision Cutting of Single Crystal Silicon Using Diamond Tool with Large Top Corner Radius

Abstract

A lot of studies on the ultra-precision cutting of single crystal silicon have been reported and they used the single crystal diamond cutting tools having the sharp cutting edge. However, the diamond cutting tools having small chamfer at the cutting edge are usually used in practical machining shops. In addition, studies on the relationship between the tool wear and the machined surface have been reported little although the relationship is important in practical applications. In this study, ultra-precision cutting of single crystal silicon, using cutting fluids, feed rate, and depth of cut as experimental parameters, were carried out by using the single crystal diamond cutting tools having small chamfer and large nose radius, and effects of the cutting fluids, the feed rate, and the depth of cut on the machining accuracy and tool wear were studied. As a result, the optimum cutting conditions was obtained as follows: the cutting fluid was kerosene, the feed rate was 2.0μm/rev, and the depth of cut was 1.0μm.

Ultra-precision machining of a large amplitude umbrella surface based on slow tool servo

“…Actually, the diamond tool used in SPDT is not a point but an arc. In order to ensure the surface accuracy of the umbrella surface, the tool radius of the tool contact path should be compensated to obtain the path of tool location points [17,18]. Figure 13 depicts the principle of tool radius compensation.…”

Effect of Binding and Dispersion Behavior of High-Entropy Alloy (HEA) Powders on the Microstructure and Mechanical Properties in a Novel HEA/Diamond Composite

“…Nowadays, with the rapid development of advanced manufacturing techniques, especially in aerospace, photovoltaics, electronics and communications, there is growing demand for diamond tools [ 1 , 2 ]. Traditionally, diamond tool materials were prepared either by cold-pressing or pressing-and-sintering of a combination of single metal and pre-alloyed powders together with a matrix material, considering the poor thermal stability of diamond and limitations of molding processes, and it is difficult to guarantee the stability and consistency of performance of the matrix materials [ 3 , 4 ].…”