Ultra-precision grinding of monocrystalline silicon reflector

Zi-guang, 王紫光 Wang; Ren-ke, 康仁科 Kang; Ping, 周平 Zhou; Shang, 高 尚 Gao; Zhi-gang, 董志刚 Dong

doi:10.3788/ope.20192705.1087

Cited by 2 publications

(2 citation statements)

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“…With the characteristics of hard, brittle, wear resistance, high mechanical strength, good chemical stability [1], as well as high thermal conductivity and low thermal expansion [2], the monocrystalline silicon is widely used as the mirror material in the optical diagnosis system of large precision physical experimental devices. The monocrystalline silicon cylindrical mirror with complex collimation line such as quadratic cylinder mirror is one of the important functional components in the optical diagnosis system such as synchrotron radiation systems, laser shaping devices, and X-ray telescope systems, whose processing accuracy directly affects the comprehensive performance of the entire experimental device [3].…”

Section: Introductionmentioning

confidence: 99%

Ultra-precision grinding of monocrystalline silicon cylindrical mirror

Li,

Zhou,

et al. 2023

J. Phys.: Conf. Ser.

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As one of the important functional components in the optical diagnosis system, the processing accuracy of monocrystalline silicon cylindrical mirror directly affects the overall performance of the entire experimental device. In order to obtain high-precision monocrystalline silicon cylindrical optical elements, the coordinate transfer function models of the diamond wheel in the cylindrical surface parallel grinding process were established, and the forming process scheme was proposed based on the wheel dressing precision and element grinding precision. At the end, the experiment for a monocrystalline silicon cylindrical mirror with size of 440mm × 50mm was carried out. The PV value of form error after grinding was about 2.7μm, which proved the correctness of the transfer function and the forming process scheme of monocrystalline silicon cylindrical optical element.

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Section: Introductionmentioning

confidence: 99%

Ultra-precision grinding of monocrystalline silicon cylindrical mirror

Li,

Zhou,

et al. 2023

J. Phys.: Conf. Ser.

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“…But they are not sufficiently effective in machining free-form optics on hard and brittle materials [9]. Ultra-precision grinding has been demonstrated to have outstanding capability in machining difficult-to-cut materials [10]. To obtain better imaging quality of the mirror, it is particularly important to ensure the surface accuracy of the off-axis parabolic surface in grinding processing [11,12].…”

Section: Introductionmentioning

confidence: 99%

Effect of Wheel Path in Raster Grinding on Surface Accuracy of an Off-Axis Parabolic Mirror

Li,

Guo

et al. 2023

Applied Sciences

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Off-axis parabolic mirrors have extensive applications in X-ray optics, with the precision of their curvature directly impacting grazing-incidence focusing performance. Notably, the off-axis parabolic surface has non-rotating and non-symmetrical characteristics. Ultra-precision raster grinding utilizing a diamond wheel is a common method. Crucially, establishing an optimal wheel path stands as the key to ensuring surface accuracy during off-axis paraboloid grinding. In this study, according to the double curvature property of an off-axis parabolic surface, two different wheel paths were compared: one tracing the meridian direction (parabolic generatrix) and the other following the arc vector direction (arc). The results showed that the wheel path in raster grinding stepping along the arc vector direction can obtain a smaller scallop height and higher surface accuracy. The surface accuracy of one step along the arc vector direction is 9.6 μm, and that of the other step along the meridian direction is 32.6 μm. A model of the scallop height was established based on the relative relationship between adjacent wheel paths, and the error is within 5%. According to the correlation between scallop height and shape error, we conducted an analysis of the spatial distribution of shape errors under varying wheel paths. The wheel path that steps along the arc vector is more suitable for raster grinding of the off-axis paraboloid. The above study can provide theoretical guidance for the wheel path planning of off-axis parabolic mirrors with high surface accuracy.

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Ultra-precision grinding of monocrystalline silicon reflector

Cited by 2 publications

References 0 publications

Ultra-precision grinding of monocrystalline silicon cylindrical mirror

Ultra-precision grinding of monocrystalline silicon cylindrical mirror

Effect of Wheel Path in Raster Grinding on Surface Accuracy of an Off-Axis Parabolic Mirror

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