Ultra thin high index contrast photonic crystal slabs in lithium niobate

Hartung, Holger; Kley, Ernst‐Bernhard; Gischkat, Thomas; Schrempel, Frank; Wesch, W.; Tünnermann, Andreas

doi:10.1016/j.optmat.2010.07.012

Cited by 29 publications

(19 citation statements)

References 14 publications

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“…The irradiation was performed at various energies: 600 keV with a fluence of 7.2·10 14 cm −2 and 350, 150, 60 keV each with a fluence of 1.38·10 14 cm −2 . The resulting defect distribution in the crystal was designed to obtain a layer of homogeneously damaged material starting from the surface down to the designed depth of 500 nm [43].…”

Section: Fabrication Process Of the Lithium Niobate Nanowaveguidesmentioning

confidence: 99%

“…The helium-ion irradiation formed a buried damaged layer inside the crystal [46] with a thickness of 450 nm. The layer was positioned below the substrate surface and connected exactly with the damaged region created by the preceding argon-ion irradiations [43].…”

Section: Fabrication Process Of the Lithium Niobate Nanowaveguidesmentioning

confidence: 99%

“…However, the shapes of the resulting patterns are very limited due to their strongly inclined sidewalls [37][38][39][40][41] that originate from the isotropic etching behavior. A more suitable pattern transfer technique is ion-beam enhanced etching (IBEE) [42], which was specifically developed for high aspect ratio nanostructures in LiNbO 3 [43,44]. Basically, IBEE uses ion-beam irradiation to damage the crystal structure of the LiNbO 3 .…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of free-standing lithium niobate nanowaveguides down to 50 nm in width

Geiß¹,

Sergeyev²,

Hartung³

et al. 2015

Nanotechnology

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Nonlinear optical nanoscale waveguides are a compact and powerful platform for efficient wavelength conversion. The free-standing waveguide geometry opens a range of applications in microscopy for local delivery of light, where in situ wavelength conversion helps to overcome various wavelength-dependent issues, such as biological tissue damage. In this paper, we present an original patterning method for high-precision fabrication of free-standing nanoscale waveguides based on lithium niobate, a material with a strong second-order nonlinearity and a broad transparency window covering the visible and mid-infrared wavelength ranges. The fabrication process combines electron-beam lithography with ion-beam enhanced etching and produces nanowaveguides with lengths from 5 to 50 μm, widths from 50 to 1000 nm and heights from 50 to 500 nm, each with a precision of few nanometers. The fabricated nanowaveguides are tested in an optical characterization experiment showing efficient second-harmonic generation.

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Section: Fabrication Process Of the Lithium Niobate Nanowaveguidesmentioning

confidence: 99%

Section: Fabrication Process Of the Lithium Niobate Nanowaveguidesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Fabrication of free-standing lithium niobate nanowaveguides down to 50 nm in width

Geiß¹,

Sergeyev²,

Hartung³

et al. 2015

Nanotechnology

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“…The PhC cavities were fabricated by focused ion beam (FIB) milling in an X-cut LN wafer previously irradiated by helium ions. 12,13 The He ion irradiation gives rise to a buried damaged layer that can be etched by hydrofluoric acid much faster than the non-irradiated part of the crystal. After this selective wet etching process, the PhC cavities lie in a 0.76a thick LN membrane suspended above the LN substrate.…”

mentioning

confidence: 99%

Mode analysis of photonic crystal L3 cavities in self-suspended lithium niobate membranes

Diziain

Geiß

Zilk

et al. 2013

Applied Physics Letters

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We report on a multimodal analysis of photonic crystal L3 cavities milled in lithium niobate freestanding membranes. The classical L3 cavity geometry is compared to an L3 cavity containing a second lattice superimposed on the primary one. Those two different geometries are investigated in terms of vertical radiation and quality (Q) factor for each mode of the cavities. Depending on the cavity geometry, some modes undergo an enhancement of their vertical radiation into small angles while other modes experience a higher Q factor. Experimental characterizations are corroborated by three-dimensional finite difference time domain simulations

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“…The maximum index contrast can be achieved in free-standing membranes fabricated by ion-beam enhanced etching ͑IBEE͒, with an air hole lattice being drilled either by FIB, 9 or directly by IBEE. 10,11 This last technique is advantageous owing to its potential to be scaled up to wafer size areas. Nevertheless, the optical properties of PhCs etched by IBEE have not yet been investigated experimentally.…”

mentioning

confidence: 99%

Light propagation in a free-standing lithium niobate photonic crystal waveguide

Geiß

Diziain

Iliew

et al. 2010

Applied Physics Letters

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We report on the light propagation in a one-line-defect photonic crystal waveguide (W1 PhC WG) patterned into a 450 nm thick free-standing lithium niobate membrane by ion-beam enhanced etching. The Bloch wave vectors and transmission spectrum of this PhC WG were retrieved from optical near-field images. The experimental data show good agreement with simulations performed with the three-dimensional (3D) finite-element method and the 3D finite-difference time-domain method. Those results are promising for the development of integrated optics devices operating at telecom wavelengths and based on free-standing lithium niobate PhC membranes.

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Ultra thin high index contrast photonic crystal slabs in lithium niobate

Cited by 29 publications

References 14 publications

Fabrication of free-standing lithium niobate nanowaveguides down to 50 nm in width

Fabrication of free-standing lithium niobate nanowaveguides down to 50 nm in width

Mode analysis of photonic crystal L3 cavities in self-suspended lithium niobate membranes

Light propagation in a free-standing lithium niobate photonic crystal waveguide

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