Ultra-wide frequency broadening mechanism for micro-scale electromagnetic energy harvester

Liu, Huicong; Koh, Kah How; Lee, Chengkuo

doi:10.1063/1.4863565

Cited by 60 publications

(43 citation statements)

References 11 publications

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“…The first term is due to the bending strain and produces a linear spring constant, whereas the second term, related to the stretching strain, produces the cubic term. Observing this expression the nonlinear term will be significant for displacements larger that the thickness of the beam [60].…”

Section: Electromagnetic Transductionmentioning

confidence: 99%

“…The device allows to retrieve vibration energy in any direction due to the specific design that fixes an angle of 45 • between the suspending beams and the Fig. 22 Schematic of the electromagnetic harvester presented in [60]. A crosssection of the device is shown at the bottom of the figure.…”

Section: Electrostatic Transductionmentioning

confidence: 99%

“…The authors in [60] propose a device for electromagnetic energy harvesting. This device uses a SOI wafer for which the thickness of the active layer and the bulk of the wafer are 5µm and 400µm respectively.…”

Section: Electromagnetic Transductionmentioning

confidence: 99%

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MEMS Technologies for Energy Harvesting

Domínguez-Pumar

Pons-Nin

Chávez-Domínguez

2016

Nonlinearity in Energy Harvesting Systems

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The objective of this chapter is to introduce the technology of Microelectromechanical Systems, MEMS, and its application to emerging energy harvesting devices. The chapter begins with a general introduction to the most common MEMS fabrication processes. Next, the chapter follows with a survey of design mechanisms implemented in MEMS energy harvesters to provide nonlinear mechanical actuations. Mechanisms to produce bistable potential will be studied, such as by placing fixed magnets, buckling of beams, or by using slightly slanted clamped-clamped beams. Other nonlinear mechanisms are studied such as impact energy transfer, or the design of nonlinear springs. Finally, due to their importance in the field of MEMS and their application to energy harvesters, an introduction to the actuation with piezoelectric materials is made. Examples of energy harvesters found in the literature using this actuation principle are also presented.

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Section: Electromagnetic Transductionmentioning

confidence: 99%

Section: Electrostatic Transductionmentioning

confidence: 99%

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MEMS Technologies for Energy Harvesting

Domínguez-Pumar

Pons-Nin

Chávez-Domínguez

2016

Nonlinearity in Energy Harvesting Systems

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“…The thickness of the sputtered metallic layers is normally small due to the slow deposition rate and reported sputtered metals such as Aluminium has higher resistivity than copper. Similar sputtered, double layer coil is used in other works as well [7], [23]. Eletroplated planar copper coils are previously used [6], [15] as opposed to sputtered coils in order to develop thick conducting layers.…”

mentioning

confidence: 99%

“…Most attempts to incorporate permanent magnets using microfabrication techniques such as sputter deposition [12], electrodeposition [13] or magnetic powder bonding [14] in EM VEH have resulted in very low output power (few pW -nW) level. In other approaches, the microcoil is integrated on to the moving silicon paddle which experiences varying magnetic field due to the relative motion with respect to static NdFeB bulk magnets [6], [7], [21], [23], [28]. The output power is found to be low in such cases too due to poor magnetic flux linkage and smaller proof mass.…”

mentioning

confidence: 99%

High Figure of Merit Nonlinear Microelectromagnetic Energy Harvesters for Wideband Applications

Mallick¹,

Amann

Roy³

2017

J. Microelectromech. Syst.

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Type of publicationArticle (peer-reviewed) This article has been accepted for inclusion in a future issue of this journal. Content is final as presented, with the exception of pagination. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 1 High Figure of Merit Nonlinear Microelectromagnetic Energy Harvesters for Wideband ApplicationsDhiman Mallick, Andreas Amann, and Saibal Roy, Member, IEEE Abstract-We report a new approach for designing highperformance microelectromechanical system (MEMS) electromagnetic energy harvesting devices, which can operate at low frequency (<1 kHz) over the ultrawide bandwidth of 60-80 Hz. The output power from the devices is increased significantly at a low optimized load and this overall enhancement in performances is benchmarked using a "power integral (P f )" figure-of-merit. The experimental results show that the efficient nonlinear designs produce large P f values, giving rise to one of the highest normalized P f densities among the reported MEMS scale nonlinear energy harvesting devices. This improvement is achieved by suitably designing the nonlinear spring architectures, where the nonlinearity arises from the stretching strain of the specifically designed fixed-fixed configured spring arms under large deflections and gives rise to wideband output response. Different fundamental modes of the mechanical structures are brought relatively close, which further widens the power-frequency response by topologically varying the spring architectures and by realizing the same using the thin silicon-on-insulator substrate using MEMS processing technology. In addition, we have used the magnet as proof mass to increase the output power in contrary to conventional approach of using the coil as the proof mass in micro-electromagnetic energy harvesters. The high performance obtained from the MEMS energy harvesters with integrated double layer micro-coil is compared with the same using wire wound copper coil. The experimentally obtained results are qualitatively explained by using a finite-element analysis of the designed structures.[2016-0038]

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More Than Energy Harvesting in Electret Electronics‐Moving toward Next‐Generation Functional System

Zhu

Yang

Zhang

et al. 2023

Adv Funct Materials

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Electrets are normally applied for energy conversion from mechanical vibration sources in the environment to electrical power without any friction, which induces electric device sustainability and mechanically robust. It functions for electron storage and electrostatic/triboelectric effect, whose electrical/mechanical performance dramatically benefits energy harvesters, self‐powered sensors, and even intelligent/sustainable systems. To summarize the progress of electret‐based electronics, this review proposes three key issues around enhanced energy harvesting toward sensors and sustainable systems. First, with the properties of long‐term charge storage characteristics and the contactless mechanism for energy harvesting, the enhancement effect in electret from MEMS devices, porous microstructure devices, and multilayer electret devices are carefully assessed with the output power from various devices. Second, the multi‐functional applications aspect along with the triboelectric coupling effect and artificial piezoelectric materials are discussed as future electret devices, for example, polydimethylsiloxane materials. Third, more than energy harvesting, machine learning‐enabled methodology in electret electronics can be more reliable and sustainable, dramatically contributing to the living standard of the society. Electret technologies on the future development trends are finally analyzed and strengthened toward multifunctional, sustainable, and intelligent systems along with the upcoming technologies in coupling mechanism, artificial composite materials, and machine learning in data fusion.

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Ultra-wide frequency broadening mechanism for micro-scale electromagnetic energy harvester

Abstract: Frequency up-converted wide bandwidth piezoelectric energy harvester using mechanical impact

Cited by 60 publications

References 11 publications

MEMS Technologies for Energy Harvesting

MEMS Technologies for Energy Harvesting

High Figure of Merit Nonlinear Microelectromagnetic Energy Harvesters for Wideband Applications

More Than Energy Harvesting in Electret Electronics‐Moving toward Next‐Generation Functional System

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