Ultrafast laser processing of flexible ultrathin glass

Abstract

We present an optical concept and adapted ultrashort pulsed laser parameters for a precise cleaving process of flexible ultrathin glasses. To this end, non-diffracting beams with tailored transverse intensity profiles generate asymmetric type-III-regime modifications along the entire substrate thickness. These laser-induced material changes not only show advantages in cutting but can also improve the bending properties of these flexible glasses when arranged in a specific manner. During the relative movement of the workpiece to the processing optics, crack connection occurs between the specifically aligned modifications only, which considerably facilitates glass separation and increases yield.