“…We need high quality ultrathin films for SSPDs; with the thickness of about 5nm, a sharp superconducting transition, and a smooth surface. There have been several reports towards the realization of SSPDs using YBa 2 Cu 3 O 7- films with T c about 90 K [11][12][13][14][15]. However, as the thickness decreases to 5 nm, the quality of the films strongly deteriorates [14].…”