2019
DOI: 10.1109/jphot.2019.2899666
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Ultrahigh Q Polymer Microring Resonators for Biosensing Applications

Abstract: The capability of an ultrahigh Q polymer microring resonator as a biosensing system is systematically investigated. By optimizing the device design and fabrication process, the device operates in the slightly under-coupled regime with a record intrinsic Q factor of 8.0 × 10 5 , which offers a high sensitivity and low detection limit. In surface mass detection, a surface mass density of 12.7 pg/mm 2 of bovine serum albumin is detected due to the physical adsorption. The noise-equivalent detection limit is appro… Show more

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Cited by 32 publications
(20 citation statements)
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“…From such relations, we readily find that high-Q resonances are always beneficial. Indeed, many high-Q resonators, including photonic crystal cavities (PhC) [11], [12], micro-ring resonators [13], [14], whispering gallery mode cavities [15], [16], etc., have been explored for building compact on-chip integrated RI sensors. For PhC devices, localized PhC defect cavities [17]- [20] offer a moderately high Q of 10 4 ∼ 10 5 , but small field overlap with the analyte limits their sensitivities.…”
Section: Introductionmentioning
confidence: 99%
“…From such relations, we readily find that high-Q resonances are always beneficial. Indeed, many high-Q resonators, including photonic crystal cavities (PhC) [11], [12], micro-ring resonators [13], [14], whispering gallery mode cavities [15], [16], etc., have been explored for building compact on-chip integrated RI sensors. For PhC devices, localized PhC defect cavities [17]- [20] offer a moderately high Q of 10 4 ∼ 10 5 , but small field overlap with the analyte limits their sensitivities.…”
Section: Introductionmentioning
confidence: 99%
“…Photonic integrated circuits (PICs) are widely employed in the field of data- and telecommunication 1 , and have gained much attention in various other fields of application such as bio-medical and chemical sensing 2,3 , optical gyroscopes 4,5 , optical coherence tomography 6,7 , and astronomy 8 . Most of these PICs rely either on an external coupling of coherent light into the chip, which can be achieved for example by end-facet 9 or grating coupling 10,11 , or the heterogeneous integration of a semiconductor laser through bonding.…”
Section: Introductionmentioning
confidence: 99%
“…As for [35], 6000 µm radius decrease the loss but also FSR to 0.017 nm, which limits applications of the devices. Owing to the loss of polymer waveguides [21], it is hard to get a Q-factor of >10 6 . In Reference [20], a rolled-up microtubes (RUMs)/ silicon-on-insulator (SOI) waveguide system with high-quality-factor of 1.5 × 10 5 is demonstrated.…”
Section: Device Fabrication and Characterizationmentioning
confidence: 99%
“…In particular, the microring resonators (MRRs) with compact sizes and ultrahigh-Q factors show great potential in lasers [10][11][12][13][14]20], sensors [21][22][23][24], and filters [25][26][27][28]. Compared with basic MRRs, the racetrack MRRs using lateral coupling, increase the coupling gap size and the fabrication tolerance.…”
Section: Introductionmentioning
confidence: 99%