Abstract:Dielectric materials with excellent dielectric properties are being promoted in requirements of microelectronic devices. In this study, (In0.5Ta0.5)0.1Ti0.9O2 ceramics were achieved by a solid-state reaction with reducing atmosphere of N2. Also, dense microstructure, ultrahigh permittivity (εr = 1.18 × 105) and ultralow dielectric loss (tanδ = 0.0072) were demonstrated at1 kHz. Interestingly enough, the temperature coefficient of permittivity which satisfies X9D (-100 °C - 235 °C, Δεr/ε25°C < ± 3.3 %) maint… Show more
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