2010
DOI: 10.1088/0256-307x/27/10/108501
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Ultrasensitive Detection of Infrared Photon Using Microcantilever: Theoretical Analysis

Abstract: We present a new method for detecting near-infrared, mid-infrared, and far-infrared photons with an ultrahigh sensitivity. The infrared photon detection was carried out by monitoring the displacement change of a vibrating microcantilever under light pressure using a laser Doppler vibrometer. Ultrathin silicon cantilevers with high sensitivity were produced using micro/nano-fabrication technology. The photon detection system was set up. The response of the microcantilever to the photon illumination is theoretic… Show more

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Cited by 5 publications
(2 citation statements)
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“…Consequently, the equivalent of a large bucket detector may be realized by shining light directly on the tuning fork. This has been demonstrated in the visible to IR frequency regime [92,93] and may find particular use in the far-IR and THz [72][73][74]94].…”
Section: Discussionmentioning
confidence: 93%
“…Consequently, the equivalent of a large bucket detector may be realized by shining light directly on the tuning fork. This has been demonstrated in the visible to IR frequency regime [92,93] and may find particular use in the far-IR and THz [72][73][74]94].…”
Section: Discussionmentioning
confidence: 93%
“…The structure of water tunnel was large and expensive. The experiment was complicated [7]. And the experimental sample was difficult to fix in the water tunnel especially.…”
Section: Introductionmentioning
confidence: 99%