2014
DOI: 10.1021/la5032027
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Ultrasmooth Gold Surfaces Prepared by Chemical Mechanical Polishing for Applications in Nanoscience

Abstract: For over 20 years, template stripping has been the best method for preparing ultrasmooth metal surfaces for studies of nanostructures. However, the organic adhesives used in the template stripping method are incompatible with many solvents, limiting the conditions that may subsequently be used to prepare samples; in addition, the film areas that can be reliably prepared are typically limited to ∼1 cm(2). In this article, we present chemical-mechanical polishing (CMP) as an adhesive-free, scalable method of pre… Show more

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Cited by 25 publications
(14 citation statements)
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“…There are four main methods to prepare the metal substrates ( Figure 6), viz; (a) chemical mechanical polishing (CMP); (b) physical vapor deposition (PVD); (c) template stripping; and (d) annealing-assisted template stripping [11]. CMP and PVD are common method to make flat metal surface but with limited flatness [49]. For over two decades, template stripping has been the method of choice to make ultra-flat surface with low roughness (~0.4 nm) [49], see Section 3.2.…”
Section: Substrates Preparationmentioning
confidence: 99%
See 1 more Smart Citation
“…There are four main methods to prepare the metal substrates ( Figure 6), viz; (a) chemical mechanical polishing (CMP); (b) physical vapor deposition (PVD); (c) template stripping; and (d) annealing-assisted template stripping [11]. CMP and PVD are common method to make flat metal surface but with limited flatness [49]. For over two decades, template stripping has been the method of choice to make ultra-flat surface with low roughness (~0.4 nm) [49], see Section 3.2.…”
Section: Substrates Preparationmentioning
confidence: 99%
“…CMP and PVD are common method to make flat metal surface but with limited flatness [49]. For over two decades, template stripping has been the method of choice to make ultra-flat surface with low roughness (~0.4 nm) [49], see Section 3.2. The annealing-assisted template stripping generally involve two parts, an annealing step and a template stripping step.…”
Section: Substrates Preparationmentioning
confidence: 99%
“…However, the size and shape of the resultant surface is determined by the spreading of the glass droplet, which is poorly controlled, and compulsory use of this material makes the technique impractical for other substrates. Miller et al use chemical mechanical polishing (CMP) on gold-coated substrates that can be used for very large areas (44 cm 2 ) 14 . Their roughness values are in the same range as TSG samples: ~0.35 nm root-mean-square (RMS) over 1 μm 2 areas.…”
Section: Introductionmentioning
confidence: 99%
“…Analysis by nanoIR2 (Anasys Instrument, USA) was performed on atomically flat and positive gold substrates with a nominal roughness of 0.36 nm (Platypus Technologies, USA) 43 . The root mean square roughness of the AFM maps was measured by SPIP (Image metrology, Denmark).…”
Section: Afm-ir Measurements Maps Treatment and Analysismentioning
confidence: 99%