Ultrasonic Energy Transmission and Conversion Using a 2-D MEMS Resonator

Zhu, Yong; Moheimani, S. O. Reza; Yuce, Mehmet Rasit

doi:10.1109/led.2010.2040575

Cited by 28 publications

(23 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Over the initial 15-s period, the voltage increases from 0.04 to 0.95 V, which corresponds to an average power output of 27.6 nW. With all other experimental testing variables being equal, this represents a 29% improvement over the power figure shown in [7].…”

Section: Experimental Characterizationmentioning

confidence: 95%

“…To convert the vibrations of the proof mass into capacitance variations to facilitate the harvesting of electrical energy, the MEMS energy harvester presented in [7] features conventional overlap-varying electrodes. These are in the form of parallel comb fingers with a finger width and interfinger gap of 3 μm.…”

Section: B Triangular Electrostatic Electrodesmentioning

confidence: 99%

“…Although some of these parameters such as g 0 are dependent on the minimum feature size of the fabrication process, other parameters, including L 0 and α are optimally chosen based on the maximum displacement of the harvester's mechanical structure. To maximize the total change in capacitance of the MEMS energy harvester's triangular electrodes, the experimentally obtained characterization data for the earlier device presented in [7] was utilized. The electrode parameters were chosen based on the harvester displacement previously observed, and they are listed in Table I.…”

Section: B Triangular Electrostatic Electrodesmentioning

confidence: 99%

See 2 more Smart Citations

Design and Characterization of a 2-DOF MEMS Ultrasonic Energy Harvester With Triangular Electrostatic Electrodes

Fowler

Moheimani

Behrens

2013

IEEE Electron Device Lett.

View full text Add to dashboard Cite

This letter presents a microelectromechanical systems (MEMS) based energy harvester designed for applications such as the powering of implanted biomedical devices. The harvester is mechanically excited by an external source of ultrasonic waves with triangular electrostatic electrodes being used to produce electrical power from the vibrations of the system's proof mass. Comparisons are made with a previous MEMS harvester that uses conventional comb-finger electrostatic electrodes to demonstrate that the triangular electrodes result in a more effective conversion process. Experimental characterization shows that the device produces an average power output of 27.6 nW, which corresponds to a 29% increase in power output over the conventional comb-finger device.Index Terms-Electrostatic transducer, energy harvesting, energy scavenging, microelectromechanical systems (MEMS).

show abstract

Section: Experimental Characterizationmentioning

confidence: 95%

Section: B Triangular Electrostatic Electrodesmentioning

confidence: 99%

Section: B Triangular Electrostatic Electrodesmentioning

confidence: 99%

See 1 more Smart Citation

Design and Characterization of a 2-DOF MEMS Ultrasonic Energy Harvester With Triangular Electrostatic Electrodes

Fowler

Moheimani

Behrens

2013

IEEE Electron Device Lett.

View full text Add to dashboard Cite

show abstract

“…Ultrasound has been considered to wireless power transfer through the human body, which contains approximately 60% water (34). However, low PTE in the order of 40% at 10 mm separation has severely limited its application in WPT to high-power IMDs (35). In addition, the size of typical ultrasonic systems is still too large to be implanted in the body.…”

Section: Wireless Power Transmission Mechanismsmentioning

confidence: 99%

Inductive Power Transmission Systems

Kiani

Ghovanloo

2016

Wiley Encyclopedia of Electrical and Electronics Engineering

View full text Add to dashboard Cite

Powering up and recharging a variety of mobile devices, such as implantable medical devices (IMD), smartphones, and electric vehicles, are governed by the same fundamental principles of near‐field inductive coupling, which guide the design constraints and practical considerations of inductive power transmission described in this article. The coupling coefficient and power transmission efficiency (PTE) of an inductive link, which are affected by important geometrical and circuit design parameters on both transmitter (Tx) and receiver (Rx) sides, are discussed. The inductive link PTE has been modeled based on the reflected load theory, indicating that the mutual coupling between the coils has the most significant effect on the PTE, followed by the primary and secondary coils' quality factors. To these factors, one should add the load resistance, source resistance, carrier frequency, and the surrounding environment. Three and four‐coil inductive links have been utilized as a way to achieve optimal loading condition and to reduce the negative effect of load/source resistances on the PTE. This article also includes an optimization method for the wireless links that are made of printed spiral coils (PSC), which are suitable for IMDs and radio‐frequency identification (RFID) applications.

show abstract

“…Ultrasonic energy harvest systems transfer the mechanical energy into the implant device through skin, but suffer from low energy conversion capability [7]. Capacitive coupling declares clean and quiet telemetry by using metal plates and skin tissue as capacitors [6], however, it can never be applied in animals that need to be monitored under freely moving status.…”

Section: Introductionmentioning

confidence: 99%