Ultrasonic micromotors

Moroney, R.M.; White, Richard M.; Howe, Roger T.

doi:10.1109/ultsym.1989.67086

Cited by 47 publications

(11 citation statements)

References 5 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…[17,18] Preliminary experiments with microscale ultrasonic motors have also been carried out. [ 19,201 In these latter studies, thin membranes of silicon coated with PZT have been excited into resonance with Lamb waves and small (few tens of microns in k r a l dimensions) pieces of silicon acting as rotors have been put on the membranes and movement of the rotors has been observed. Fabrication of microscale ultrasonic motors such as illustrated in Fig.…”

Section: Micromoto Rsmentioning

confidence: 99%

Ferroelectric-based microactuators

Robbins

1995

Integrated Ferroelectrics

View full text Add to dashboard Cite

Section: Micromoto Rsmentioning

confidence: 99%

Ferroelectric-based microactuators

Robbins

1995

Integrated Ferroelectrics

View full text Add to dashboard Cite

“…They have been used as structural vibration actuators and suppression or damping elements, structural health monitoring sensors, active shape control tools, non-destructive evaluation probes for materials and structures etc [1][2][3][4][5][6][7]. These piezoelectric devices can be surface bonded onto, embedded into and coated onto the host materials, which may be fiber composites such as graphite/epoxy, semiconductors and metals.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric thick bismuth titanate/lead zirconate titanate composite film transducers for smart NDE of metals

Kobayashi¹,

Jen²

2004

Smart Mater. Struct.

113

View full text Add to dashboard Cite

Thick film piezoelectric ceramic sensors have been successfully deposited on different metallic substrates with different shapes by a sol–gel spray technique. The ball-milled bismuth titanate fine powders were dispersed into PZT solution to achieve the gel. The films with desired thickness up to 200 µm have been obtained through the multilayer coating approach. These thick films were also effectively coated onto thin sheet metals of thickness down to 25 µm. Self-support films with flat and shell geometries were made. Piezoelectricity was achieved using the corona discharge poling method. The area of the top silver paste electrode was also optimized. The center frequencies of ultrasonic signals generated by these films ranged from 3.6 to 30 MHz and their bandwidth was broad as well. The ultrasonic signals generated and received by these ultrasonic transducers (UTs) operated in the pulse/echo mode had a signal to noise ratio more than 30 dB. The main advantages of such sensors are that they (1) do not need couplant, (2) can serve as piezoelectric and UT, (3) can be coated onto curved surfaces and (4) can operate up to 440 °C. The capability of these thick film UTs for non-destructive evaluation of materials at 440 °C has been demonstrated.

show abstract

“…T o broaden the range of applications of ultrasonic motors, noncontact ultrasonic motors have been proposed and studied [1]- [16]. Noncontact ultrasonic motors are a class of ultrasonic motors for which there is no direct contact between the stator and the rotor or slider.…”

Section: Introductionmentioning

confidence: 99%

A standing wave-type noncontact linear ultrasonic motor

Chan

et al. 2001

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

View full text Add to dashboard Cite

In this study, a novel standing wave-type noncontact linear ultrasonic motor is proposed and analyzed. This linear ultrasonic motor uses a properly controlled ultrasonic standing wave to levitate and drive a slider. A prototype of the motor was constructed by using a wedgeshaped aluminum stator, which was placed horizontally and driven by a multilayer PZT vibrator. The levitation and motion of the slider were observed. Assuming that the driving force was generated by the turbulent acoustic streaming in the boundary air layer next to the bottom surface of the slider, a theoretical model was developed. The calculated characteristics of this motor were found to agree quite well with the experimental results. Based on the experimental and theoretical results, guidelines for increasing the displacement and speed of the slider were obtained. It was found that increasing the stator vibration displacement, or decreasing the gradient of the stator vibration velocity and the weight per unit area of the slider, led to an increase of the slider displacement. It was also found that increasing the amplitude and gradient of the stator vibration velocity, or decreasing the weight per unit area of the slider and the driving frequency, gave rise to an increase of the slider speed. There exists an optimum roughness of the bottom surface of the slider at which the slider speed has a maximum.

show abstract

Ultrasonic micromotors

Cited by 47 publications

References 5 publications

Ferroelectric-based microactuators

Ferroelectric-based microactuators

Piezoelectric thick bismuth titanate/lead zirconate titanate composite film transducers for smart NDE of metals

A standing wave-type noncontact linear ultrasonic motor

Contact Info

Product

Resources

About