Ultrasonically driven surface micromachined motor

Kaajakari, V.; Rodgers, S.; Lal, Amit

doi:10.1109/memsys.2000.838487

Cited by 17 publications

(9 citation statements)

References 11 publications

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“…As reported by manufacturers such as Ferroperm Piezoceramics [7] and Morgan Electroceramics [8], the piezoelectric coefficient, d 33 for bulk materials can be in the range of 300 -600 pC/N. One of the prominent applications of bulk piezoelectric material is to drive micro-fabricated mechanical amplifiers devices as reported in [9]. Bulk piezoceramics, however, tend to be relatively thick, which limit their application for micro-scale structures.…”

Section: Piezoelectric Materials For Memsmentioning

confidence: 99%

Thick-film Piezoceramic Microgenerators

Kok

Harris

White

2008

Measurement and Control

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Piezoelectric materials have many desirable characteristics for use in vibration energy harvesting applications. They can produce relatively high output voltages (from a few to several tens of volts) for modest levels of vibration. Many piezoelectric-based generators use piezoceramic materials such as bulk lead zirconate titanate (PZT), which are attached to an elastic element (spring/beam) by using an adhesive. Thick-film technology can offer an advantage over this approach by providing the ability to integrate fully the piezoelectric element onto the beam. This paper provides an overview of the use of piezoelectric materials in energy harvesters and discusses a novel approach to developing freestanding, thick-film piezoelectric devices

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Section: Piezoelectric Materials For Memsmentioning

confidence: 99%

Thick-film Piezoceramic Microgenerators

Kok

Harris

White

2008

Measurement and Control

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“…This leaves the beam in the s-shape, and the deformation is given by . This energy release rate, which represents a constant that is independent of the applied pressure or point loads, is given by (12) See [3], [5], and [6]. The subscript represents the "static" contribution for the energy release rate due to the initial static deflection of the beam.…”

Section: B Fracture Modelmentioning

confidence: 99%

“…The applied force (1) is introduced, and displacements are referenced to the deformed state arising from imposing (12). The energy release rate may be derived from an energy flux integral approach [21].…”

Section: B Fracture Modelmentioning

confidence: 99%

“…If one assumes that the initial unstuck length is governed by the condition given as (12), then the system is initially at an unstable equilibrium; any loading that increases the gap size (by decreasing the deflection from the initial value ) will trigger decohesion. When inertia effects are neglected, no amount of electrostatic pressure, which acts to narrow the gap, will trigger decohesion.…”

Section: B Fracture Modelmentioning

confidence: 99%

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On the Use of Structural Vibrations to Release Stiction Failed MEMS

Savkar

Murphy

Leseman

et al. 2007

J. Microelectromech. Syst.

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Abstract-This paper identifies dynamic excitation parameters that promote decohesion of stiction-failed microcantilevers. The dynamic response of "s-shaped" adhered beams subjected to harmonic loading is described using modal analysis; this model is then used to predict the onset of debonding in the context of a critical interface energy. These theoretical results are used to rationalize preliminary experiments, which illustrate that dynamic excitation may be used to affect partial or complete repair of stiction-failed microcantilevers. The theoretical results provide fundamental insight regarding regimes where resonant effects trigger debonding and can serve as a potential mechanism for stiction repair. The models illustrate that driving a structure at resonance is usually beneficial with regards to debonding. However, this is not universally true; there is no benefit to driving a device at frequencies with unfavorable mode-shapes. Thus, these results provide a reasonable physical and mathematical explanation for the preliminary experimental results, while providing a roadmap for identifying parameters in future tests.[

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“…The entire substrate vibrates and the energy gets coupled to the surface micromachines via inertial drive and elastic deformation at the actuator anchor. We have previously used this approach for microengine actuation and surface micromachine assembly [10,11]. The micro-structures inside the channel get preferentially excited depending upon the individual resonance frequencies as defined by the geometry and material properties.…”

Section: Introductionmentioning

confidence: 99%

An acoustic vortex generator for microfluidic particle entrapment

Sathaye

Lal²

2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263)

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In this paper, we report on a flexural plate wave device (FPW) for particle entrapment inside a microfluidic channel. Surface micromachined polysilicon actuators placed inside the channel are driven at their flexural plate wave resonances by applying suitable drive-voltage to an external bulk piezoelectric PZT (Lead-Zirconate-Titanate Oxide) plate. The resonating polysilicon surface micromachines generate shear viscous acoustic field in the surrounding fluid. The field results in fluid vortices that can trap particles in the fluid flow. The acoustic vortex generator can be used for bead concentration in micro-fluidic assay.

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Ultrasonically driven surface micromachined motor

Cited by 17 publications

References 11 publications

Thick-film Piezoceramic Microgenerators

Thick-film Piezoceramic Microgenerators

On the Use of Structural Vibrations to Release Stiction Failed MEMS

An acoustic vortex generator for microfluidic particle entrapment

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