We demonstrate a tunnel diode composed of a vertical MoS 2 /SiO 2 /Si heterostructure. A MoS 2 flake consisting four areas of different thicknesses functions as a gate terminal of a silicon field-effect transistor. A thin gate oxide allows tunneling current to flow between the n-type MoS 2 layers and p-type Si channel. The tunneling-current characteristics show multiple negative differential resistance features, which we interpret as an indication of different conduction-band alignments of the MoS 2 layers of different thicknesses. The presented tunnel device can be also used as a hybrid-heterostructure device combining the advantages of two-dimensional materials with those of silicon transistors. V C 2015 AIP Publishing LLC. [http://dx.doi.org/10.1063/1.4927529] Downsizing of Si field-effect transistors (FETs) has allowed ever-advancing performance and integration of electrical circuits. The downsizing also provides Si with unique characteristics including band-gap opening, 1,2 energy-level quantization, 3,4 and valley splitting, 5,6 which open ways for fascinating applications, e.g., a resonant tunneling diodes, 3 a light emitting diodes, 6,7 and a tool for tunneling spectroscopy. 4 In particular, tunneling spectroscopy, which is typically done using a scanning tunneling microscopy (STM), provides not only information about energy quantization, not observable in conventional current characteristics of FETs, but also can be used to implement light emitting devices. 8 These approaches promise for "More than Moore," which expands functions of Si FETs and their circuits. However, since Si has indirect band gap and heavy electron mass, applications utilizing band-diagram engineering have limitations compared to compound semiconductors. Two-dimensional materials, on the other hand, have recently emerged as a candidate to substitute Si in "Beyond CMOS." With direct bandgaps and lighter electron masses, two-dimensional materials have attracted much attention because of their potential for electronic and optical applications as well as physics. The research on the twodimensional materials had been boosted by the pioneering works on graphene 9,10 and has covered other materials including transition-metal dichalcogenides MX 2 and black phosphorous. 11-13 These two-dimensional materials are composed of layers with strong in-plane bonds and with weak van der Waals force mediated interlayer interactions, making possible to exfoliate them into atomically thin layers. MoS 2 , one of the layered MX 2 materials, has been studied widely for various applications such as transistors, 14,15 photo sensors, 16,17 and valleytronics and spintronics devices. 18,19 In analogy with other two-dimensional materials, the band gap of MoS 2 is modulated by the number of MoS 2 layers, showing an indirect band gap of 1.28 eV in bulk that increases while reducing the number of layers. In the single-layer limit, MoS 2 exhibits a direct band gap of 1.9 eV, 20,21 promising for light-emitting diodes. 22,23 In any applications using two-dimensional ma...