2003
DOI: 10.1063/1.1600832
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Ultrathin silicon-on-insulator vertical tunneling transistor

Abstract: We have fabricated silicon-on-insulator ͑SOI͒ transistors with an ultrathin Si channel of ϳ5 nm, tunneling gate oxide of ϳ1 nm, and 100 nm gate length. In addition to good transistor characteristics, these same devices exhibit additional functionality at low temperature. The drain current I D exhibits steps near the turn-on threshold voltage as a function of the backgate V BG bias on the substrate. When operated as a gate-controlled tunneling device, with source shorted to drain and I G originating from tunnel… Show more

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Cited by 32 publications
(21 citation statements)
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“…The electronic properties of a similar vertical tunneling transistor (VTT) structure, fabricated by a fully technological SOI process, were recently reported. 12 In order to minimize losses due to free-carrier absorption discussed later, the poly-Si gate is only 20 nm thick and relatively lightly doped 3x10 17 cm -3 ; whereas the Si substrate is minimally doped, with a thin ~20 nm doped layer under the buried oxide to which a back-gate bias V BG can be applied.…”
Section: Proposed Device Structure and Operationmentioning
confidence: 99%
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“…The electronic properties of a similar vertical tunneling transistor (VTT) structure, fabricated by a fully technological SOI process, were recently reported. 12 In order to minimize losses due to free-carrier absorption discussed later, the poly-Si gate is only 20 nm thick and relatively lightly doped 3x10 17 cm -3 ; whereas the Si substrate is minimally doped, with a thin ~20 nm doped layer under the buried oxide to which a back-gate bias V BG can be applied.…”
Section: Proposed Device Structure and Operationmentioning
confidence: 99%
“…As a result, devices based on the existence of sharp 2D quantization in the QW suffer from the subband broadening due to QW thickness nonuniformity. 12 In our device, given a reasonable carrier density in the well, the lateral diffusion of these electrons to the contact regions will not be affected by the local potential dips and hills due to thickness fluctuations. At the same time, recent reports of photoluminescence from Si QW down to 2 nm thickness sandwiched between SiO 2 barriers on SOI indicate that thickness nonuniformity is dropping towards a single monolayer.…”
mentioning
confidence: 92%
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“…The downsizing also provides Si with unique characteristics including band-gap opening, 1,2 energy-level quantization, 3,4 and valley splitting, 5,6 which open ways for fascinating applications, e.g., a resonant tunneling diodes, 3 a light emitting diodes, 6,7 and a tool for tunneling spectroscopy. 4 In particular, tunneling spectroscopy, which is typically done using a scanning tunneling microscopy (STM), provides not only information about energy quantization, not observable in conventional current characteristics of FETs, but also can be used to implement light emitting devices.…”
mentioning
confidence: 99%