2019
DOI: 10.1088/1674-1056/28/4/048503
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Ultraviolet photodetectors based on wide bandgap oxide semiconductor films

Abstract: Ultraviolet (UV) photodetectors have attracted more and more attention due to their great potential applications in missile tracking, flame detecting, pollution monitoring, ozone layer monitoring, and so on. Owing to the special characteristics of large bandgap, solution processable, low cost, environmentally friendly, etc., wide bandgap oxide semiconductor materials, such as ZnO, ZnMgO, Ga 2 O 3 , TiO 2 , and NiO, have gradually become a series of star materials in the field of semiconductor UV detection. In … Show more

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Cited by 55 publications
(30 citation statements)
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“…The vertical Schottky photodiode should satisfy this requirement. Although great progress has been made in Ga 2 O 3 photodetectors, the responsivity remains relatively low [76]. On the other hand, Schottky photodiodes have many advantages over MSM photodetectors, such as higher response speed and possible zero bias operation due to the builtin electric field, high quantum efficiency, low dark current, and high UV/dark current ratio because of the existence of Schottky barrier [77].…”
Section: Solar-blind Photodetectorsmentioning
confidence: 99%
“…The vertical Schottky photodiode should satisfy this requirement. Although great progress has been made in Ga 2 O 3 photodetectors, the responsivity remains relatively low [76]. On the other hand, Schottky photodiodes have many advantages over MSM photodetectors, such as higher response speed and possible zero bias operation due to the builtin electric field, high quantum efficiency, low dark current, and high UV/dark current ratio because of the existence of Schottky barrier [77].…”
Section: Solar-blind Photodetectorsmentioning
confidence: 99%
“…As photoelectronic devices that can accurately change incident light signals into electrical signals, photodetectors (PDs) have attracted much attention in recent years due to their wide applications in multiple detection bands. For example, ultraviolet photodetectors (UVPDs) play essential roles in various military and civil applications, such as defense security, UV communication, marine oil pollution monitoring, and health care. Normally, wide band gap semiconductors (WBSs, e.g., ZnO, TiO 2 , SnO 2 , and GaN) are used to fabricate UVPDs. , Based on these WBS-based UVPDs, excellent photoelectric performances in terms of high responsivity, ultralow UV detection limit, and satisfactory stability have been achieved. In spite of this, these inorganic WBSs are normally fabricated by using some sophisticated growth instruments, ,, like metal–organic vapor-phase epitaxy and molecular beam epitaxy, which significantly increased the fabrication costs. While some WBSs (e.g., ZnO and TiO 2 ) can be synthesized by using the low-cost solution method, the performances of the corresponding PDs are not satisfactory. , Hence, the low-cost and sensitive UVPDs should be further studied.…”
Section: Introductionmentioning
confidence: 99%
“…In recent times, there has been a significant interest in developing various photodetectors based on metal oxide semiconductors [17][18][19][20]. For this purpose, a lot of work has been done to fabricate ultraviolet photodetectors based on wide band gap semiconductors [21][22][23][24]. However, for the visible photodetectors, often silicon was utilized [25].…”
Section: Introductionmentioning
confidence: 99%