Uncertainties in complex permittivity extraction from coplanar waveguide scattering-parameter data

Arz, Uwe; Williams, Dylan F.

doi:10.1109/arftg.2013.6579047

Cited by 6 publications

(2 citation statements)

References 11 publications

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“…The measurements are useful for detecting faults in the fabrication of semiconductors and to enable new nanotechnologies. At PTB and NIST, thin films and bulk substrates are characterized with split cylinder cavity and coplanar waveguide techniques up to 80 GHz [85,86]. The investigated thin films are functional thin films and ferroelectric thin films.…”

Section: Rfandmw Metrologymentioning

confidence: 99%

Metrology in electricity and magnetism: EURAMET activities today and tomorrow

et al. 2017

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Metrology dedicated to electricity and magnetism has changed considerably in recent years. It encompasses almost all modern scientific, industrial, and societal challenges, e.g. the revision of the International System of Units, the profound transformation of industry, changes in energy use and generation, health, and environment, as well as nanotechnologies (including graphene and 2D materials) and quantum engineering. Over the same period, driven by the globalization of worldwide trade, the Mutual Recognition Arrangement (referred to as the CIPM MRA) was set up. As a result, the regional metrology organizations (RMOs) of national metrology institutes have grown in significance. EURAMET is the European RMO and has been very prominent in developing a strategic research agenda (SRA) and has established a comprehensive research programme. This paper reviews the highlights of EURAMET in electrical metrology within the European Metrology Research Programme and its main contributions to the CIPM MRA. In 2012 EURAMET undertook an extensive roadmapping exercise for proposed activities for the next decade which will also be discussed in this paper. This work has resulted in a new SRA of the second largest European funding programme: European Metrology Programme for Innovation and Research.

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Section: Rfandmw Metrologymentioning

confidence: 99%

Metrology in electricity and magnetism: EURAMET activities today and tomorrow

et al. 2017

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“…An on-wafer measurement system is useful for evaluating planar circuits such as co-planar and microstrip waveguides. Various studies have been conducted with regard to the accuracy of the measurement [3][4][5][6][7][8][9][10][11][12][13][14]. According to [3], the definition of the calibration standards is a major source of uncertainty in their measurement system.…”

Section: Introductionmentioning

confidence: 99%