Uncertainty evaluation for three-dimensional scanning electron microscope reconstructions based on the stereo-pair technique

Carli, Lorenzo De; Genta, Gianfranco; Cantatore, Angela; Barbato, Giulio; Chiffre, Leonardo De; Levi, Raffaello

doi:10.1088/0957-0233/22/3/035103

Cited by 31 publications

(26 citation statements)

References 10 publications

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“…The proposed method initialized a set of 3D points from 2D corresponding points and then triangulated the obtained 3D points into the 3D surface mesh with a mapped texture on the shape model. Carli et al [30] evaluated the uncertainty of stereo vision algorithm for the problem of 3D SEM surface modeling. Uncertainty for different cases of tilt and rotation were discussed in the work and relative uncertainties of 5% and 4% were achieved for the cases of rotation and tilt, respectively.…”

Section: Introductionmentioning

confidence: 99%

Three-dimensional reconstruction of highly complex microscopic samples using scanning electron microscopy and optical flow estimation

et al. 2017

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Scanning Electron Microscope (SEM) as one of the major research and industrial equipment for imaging of micro-scale samples and surfaces has gained extensive attention from its emerge. However, the acquired micrographs still remain two-dimensional (2D). In the current work a novel and highly accurate approach is proposed to recover the hidden third-dimension by use of multi-view image acquisition of the microscopic samples combined with pre/post-processing steps including sparse feature-based stereo rectification, nonlocal-based optical flow estimation for dense matching and finally depth estimation. Employing the proposed approach, three-dimensional (3D) reconstructions of highly complex microscopic samples were achieved to facilitate the interpretation of topology and geometry of surface/shape attributes of the samples. As a byproduct of the proposed approach, high-definition 3D printed models of the samples can be generated as a tangible means of physical understanding. Extensive comparisons with the state-of-the-art reveal the strength and superiority of the proposed method in uncovering the details of the highly complex microscopic samples.

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Section: Introductionmentioning

confidence: 99%

Three-dimensional reconstruction of highly complex microscopic samples using scanning electron microscopy and optical flow estimation

et al. 2017

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“…This measuring procedure, together with relevant uncertainty evaluation, was examined in the case of a cylindrical item [3]: a wire gauge from TESA Technology with an external calibrated diameter of 250 μm. It can be positioned and fixed horizontally to the SEM stage to perform eucentric tilting; multiple views of the item can be acquired at different tilt angles.…”

Section: Introductionmentioning

confidence: 99%

“…Figure 1 shows the moving stage of the SEM employed. The aim of this work is to extend the uncertainty evaluation of stereo-pair reconstructions implemented in [3], relative to both tilting and rotation strategies, allowing for correlation between the input quantities of the measurement model.…”

Section: Introductionmentioning

confidence: 99%

Uncertainty Modeling in 3d Sem Stereophotogrammetry

Carli

Galetto

Genta

2012

Series on Advances in Mathematics for Applied Sciences

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The scanning electron microscope (SEM) is widely used to acquire high resolution images. In order to reconstruct the third dimension of surface features, photogrammetry methods can be adopted. A specimen is imaged in the SEM acquiring two images, the stereo-pair, by scanning the same area from two different perspectives. The stereomatching problem is solved by area-or feature-based methods implemented in commercial software. Piazzesi provided a first model for deriving surface topography from eucentric stereo-pairs. An uncertainty evaluation for the vertical elevation has been performed in a recent work for a cylindrical item. The aim of the present work is to extend the uncertainty evaluation to all surface coordinates. The proposed approach is based on the multivariate law of propagation of uncertainty (MLPU). Some preliminary results are also presented and discussed.

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“…[6][7][8][9][10]. Moreover, it is necessary to investigate the precision of the method, in particular, determine the error of measurements of the parameters of a relief.…”

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confidence: 99%

“…Preliminary estimates of the measurement precision are performed in [1, 6,9], which also consider factors that infl uence the resolution of the method.…”

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confidence: 99%

Three-Dimensional Reconstruction of the Surfaces of Relief Structures from Stereoscopic Images Obtained in a Scanning Electron Microscope

et al. 2015

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The profi le of the surfaces of two samples of monocrystalline silicon containing trapezoidal-shaped protrusions is established by means of three-dimensional reconstruction from stereoscopic images obtained in a scanning electron microscope and the average value of the height of the protrusions is determined. The results are compared with the results of measurements by an atomic-force microscope. The advantage in terms of precision of reconstruction for a sample that has been subjected to additional plasma treatment is explained by the formation of nanodimensional morphological features of the surface in the form of contrasting elements that increase the precision of coincidence of the images in the course of 3D reconstruction.The scanning electron microscope (SEM) is one of the most frequently used devices employed in obtaining images of surfaces that possess great focal depth and high resolution (down to 1 nm). Through the use of the method of 3D reconstruction of the surface of a sample from images obtained in a scanning electron microscope, it is possible to extract information about the three-dimensional surface structure of the sample from a pair of two-dimensional SEM images obtained at different angles of inclination of the sample [1, 2]. The method utilizes the phenomenon of the stereoscopic effect, which manifests itself as a consequence of parallax, or the variation of the visible position of an object relative to a distant background as a function of the position of the observer. It is on this that, in particular, the binocular vision of man and animals is based; that is, the spatial representation of the object is formed on the basis of two images (one from the right eye and the other from the left eye) obtained from different points of view (at different angles). The spatial (volumetric) perception of the observed object (stereoscopic effect) is formed on the basis of differences in the images. Such images are called stereoscopic images (in the case of two images, a stereo pair), while the differences in the stereoscopic images are the greater, the greater are the differences in the angles at which the object is observed (stereoscopic angle).

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Uncertainty evaluation for three-dimensional scanning electron microscope reconstructions based on the stereo-pair technique

Cited by 31 publications

References 10 publications

Three-dimensional reconstruction of highly complex microscopic samples using scanning electron microscopy and optical flow estimation

Three-dimensional reconstruction of highly complex microscopic samples using scanning electron microscopy and optical flow estimation

Uncertainty Modeling in 3d Sem Stereophotogrammetry

Three-Dimensional Reconstruction of the Surfaces of Relief Structures from Stereoscopic Images Obtained in a Scanning Electron Microscope

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