Abstract:This paper presents the design, fabrication, and performance of a 256 × 256 multiband infrared (IR) focal plane array (FPA) using microbimaterial cantilever as the sensitive pixel. Different from traditional uncooled IR FPA that works only at long wavelength IR, the working bandwidth of the presented FPA is extended to full band IR, covering the three IR atmospheric windows of 1-2.5 µm, 3-5 µm and 8-14 µm simultaneously. The multiband performance is attributed to the elaborately designed multiband absorber con… Show more
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